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<front>
<journal-meta>
<journal-id journal-id-type="publisher-id">Front. Mater.</journal-id>
<journal-title>Frontiers in Materials</journal-title>
<abbrev-journal-title abbrev-type="pubmed">Front. Mater.</abbrev-journal-title>
<issn pub-type="epub">2296-8016</issn>
<publisher>
<publisher-name>Frontiers Media S.A.</publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id pub-id-type="publisher-id">1022317</article-id>
<article-id pub-id-type="doi">10.3389/fmats.2022.1022317</article-id>
<article-categories>
<subj-group subj-group-type="heading">
<subject>Materials</subject>
<subj-group>
<subject>Original Research</subject>
</subj-group>
</subj-group>
</article-categories>
<title-group>
<article-title>Analysis of synthesized doped vertical silicon nanowire arrays for effective sensing of nitrogen dioxide: As gas sensors</article-title>
<alt-title alt-title-type="left-running-head">Kashyap et al.</alt-title>
<alt-title alt-title-type="right-running-head">
<ext-link ext-link-type="uri" xlink:href="https://doi.org/10.3389/fmats.2022.1022317">10.3389/fmats.2022.1022317</ext-link>
</alt-title>
</title-group>
<contrib-group>
<contrib contrib-type="author" corresp="yes">
<name>
<surname>Kashyap</surname>
<given-names>Vikas</given-names>
</name>
<xref ref-type="aff" rid="aff1">
<sup>1</sup>
</xref>
<xref ref-type="corresp" rid="c001">&#x2a;</xref>
</contrib>
<contrib contrib-type="author">
<name>
<surname>Pawar</surname>
<given-names>Hariom</given-names>
</name>
<xref ref-type="aff" rid="aff2">
<sup>2</sup>
</xref>
<uri xlink:href="https://loop.frontiersin.org/people/2050943/overview"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname>Kumar</surname>
<given-names>Chandra</given-names>
</name>
<xref ref-type="aff" rid="aff3">
<sup>3</sup>
</xref>
</contrib>
<contrib contrib-type="author">
<name>
<surname>Chaudhary</surname>
<given-names>Neeru</given-names>
</name>
<xref ref-type="aff" rid="aff1">
<sup>1</sup>
</xref>
</contrib>
<contrib contrib-type="author" corresp="yes">
<name>
<surname>Saxena</surname>
<given-names>Kapil</given-names>
</name>
<xref ref-type="aff" rid="aff4">
<sup>4</sup>
</xref>
<xref ref-type="corresp" rid="c001">&#x2a;</xref>
<uri xlink:href="https://loop.frontiersin.org/people/1965072/overview"/>
</contrib>
</contrib-group>
<aff id="aff1">
<sup>1</sup>
<institution>Department of Physics</institution>, <institution>Panjab University</institution>, <addr-line>Chandigarh</addr-line>, <country>India</country>
</aff>
<aff id="aff2">
<sup>2</sup>
<institution>Department of Physics</institution>, <institution>JECRC University</institution>, <addr-line>Jaipur</addr-line>, <addr-line>Rajasthan</addr-line>, <country>India</country>
</aff>
<aff id="aff3">
<sup>3</sup>
<institution>Departamento de F&#xed;sica</institution>, <institution>Facultad de Ciencias</institution>, <institution>Universidad Cat&#xf3;lica del Norte</institution>, <addr-line>Antofagasta</addr-line>, <country>Chile</country>
</aff>
<aff id="aff4">
<sup>4</sup>
<institution>Department of Applied Sciences</institution>, <institution>Kamla Nehru Institute of Technology</institution>, <addr-line>Sultanpur</addr-line>, <addr-line>Uttar Pradesh</addr-line>, <country>India</country>
</aff>
<author-notes>
<fn fn-type="edited-by">
<p>
<bold>Edited by:</bold> <ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/1652837/overview">Alfonso Policicchio</ext-link>, Universit&#xe0; della Calabria, Italy</p>
</fn>
<fn fn-type="edited-by">
<p>
<bold>Reviewed by:</bold> <ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/1003216/overview">Maria Jos&#xe8; Lo Faro</ext-link>, University of Catania, Italy</p>
<p>
<ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/2008606/overview">Ramesh Ghosh</ext-link>, University of Glasgow, United Kingdom</p>
</fn>
<corresp id="c001">&#x2a;Correspondence: Vikas Kashyap, <email>vikaskashyap78647@gmail.com</email>; Kapil Saxena, <email>kapil.saxena@knit.ac.in</email>
</corresp>
<fn fn-type="other">
<p>This article was submitted to Colloidal Materials and Interfaces, a section of the journal Frontiers in Materials</p>
</fn>
</author-notes>
<pub-date pub-type="epub">
<day>24</day>
<month>11</month>
<year>2022</year>
</pub-date>
<pub-date pub-type="collection">
<year>2022</year>
</pub-date>
<volume>9</volume>
<elocation-id>1022317</elocation-id>
<history>
<date date-type="received">
<day>18</day>
<month>08</month>
<year>2022</year>
</date>
<date date-type="accepted">
<day>02</day>
<month>11</month>
<year>2022</year>
</date>
</history>
<permissions>
<copyright-statement>Copyright &#xa9; 2022 Kashyap, Pawar, Kumar, Chaudhary and Saxena.</copyright-statement>
<copyright-year>2022</copyright-year>
<copyright-holder>Kashyap, Pawar, Kumar, Chaudhary and Saxena</copyright-holder>
<license xlink:href="http://creativecommons.org/licenses/by/4.0/">
<p>This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) and the copyright owner(s) are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.</p>
</license>
</permissions>
<abstract>
<p>In the present study, the controllable fabrication of silicon nanowires (Si NWs) with vertical alignment was accomplished using metal assisted chemical etching (MACE). The different characteristics, such as structural, morphological, chemical, optical, and dielectric properties were analyzed using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), Raman spectroscopy, ultraviolet-visible diffuse reflectance spectroscopy (UV-DRS), and LCR [inductance (L), capacitance (C), and resistance (R)] meter (volume of the gas-sensing chamber is 650&#xa0;mm<sup>3</sup>). It was revealed from the morphological study i.e., from the FESEM that p-type Si NWs are smaller in size than n-type Si NWs which is attributable to the energy band gap. The optical band gap (E<sub>g</sub>) is observed to increase from 1.64 to 1.89&#xa0;eV with the decreasing of the crystallite size and the optical reflection spectra of the Si NWs show a shift toward a lower wavelength (blue shift). Moreover, Raman spectra verified the red-shifted, asymmetrically broadened Raman line-shapes, which provides information about the size confinement effect in Si NWs. The MACE approach is excellent for synthesizing nanowire structures for use in gas-sensing applications due to its flexibility. The sensitivity of synthesized Si NWs was tested for NO<sub>2</sub> gas. The sensor method is unique based on the testing of the device in the presence of a test gas because the use of the gas-sensing setup has the potential to measure the change in resistance by varying frequency, temperature, and time.</p>
</abstract>
<kwd-group>
<kwd>FESEM</kwd>
<kwd>Raman spectroscopy</kwd>
<kwd>dielectric properties</kwd>
<kwd>gas sensing</kwd>
<kwd>UV-DRS</kwd>
</kwd-group>
<contract-sponsor id="cn001">University Grants Commission<named-content content-type="fundref-id">10.13039/501100001501</named-content>
</contract-sponsor>
</article-meta>
</front>
<body>
<sec id="s1">
<title>1 Introduction</title>
<p>The field of electronics and photonics has seen semiconductor nanowires (NWs) emerge as a promising candidate in recent years due to their wide range of possible applications (<xref ref-type="bibr" rid="B45">Xi et al., 2007</xref>; <xref ref-type="bibr" rid="B10">Gonchar et al., 2016</xref>; <xref ref-type="bibr" rid="B21">Li and Kwok, 2018</xref>; <xref ref-type="bibr" rid="B9">Gonchar et al., 2019</xref>). Silicon (Si) is gaining importance as a promising approach for an industrial revolution in semiconductor technology due to its technological-based properties.</p>
<p>The enormous growth of microelectronics has benefited Si process technology. Si is potentially the only material that satisfies all of the requirements, including its non-toxicity, strong absorption optics, and high performance (greater than 10%). The manufacturing of effective devices to fuel our economies has shifted toward the more stable Si nano-crystals and NWs. Various methods are available for the synthesis of Si NWs with vast numbers of applications. Si nanostructures (NSs) have been manufactured using a wide range of processes, including chemical etching, epitaxial growth, and electron beam lithography (<xref ref-type="bibr" rid="B11">Hasan et al., 2013</xref>; <xref ref-type="bibr" rid="B33">Puglisi et al., 2019</xref>). The simplest and lowest cost method for creating NSs is metal-assisted chemical etching (MACE) (<xref ref-type="bibr" rid="B22">Li et al., 2013</xref>). Si NWs have enormous potential for usage in thermoelectric power, lithium-ion batteries, sensors, and solar energy conversion (<xref ref-type="bibr" rid="B31">Peng et al., 2008</xref>; <xref ref-type="bibr" rid="B18">Kim et al., 2010</xref>; <xref ref-type="bibr" rid="B23">Liang et al., 2014</xref>; <xref ref-type="bibr" rid="B42">Toor et al., 2016</xref>; <xref ref-type="bibr" rid="B8">Ghosh et al., 2018</xref>; <xref ref-type="bibr" rid="B41">Singh et al., 2018</xref>; <xref ref-type="bibr" rid="B14">Kashyap et al., 2021a</xref>).</p>
<p>The goal for the scientific community has been to improve human health and the environment by monitoring unsafe and poisonous substances, gases, micro-organisms, and radiation. One-dimensional (1D) material-based sensors are extremely efficient and compatible with recent manufacturing techniques resulting in data that are useful for health and environmental monitoring (<xref ref-type="bibr" rid="B49">Zhu and Zeng, 2017</xref>). Nanostructures such as nanowires can be the path to effective and advantageous sensor materials. The scientific community is working to develop sensors that can provide alerts of potential risks in response to a number of pressing issues, including protecting human health, the environment, and safety. Additionally, Si NWs may simply be scaled up for use in gas-sensing applications employing the room temperature MACE approach. The usage of gas-sensing technology is widespread in both household and industrial settings. The most crucial characteristics of gas-sensor devices are their sensitivity, working temperature, selectivity, energy consumption and cost of production (<xref ref-type="bibr" rid="B49">Zhu and Zeng, 2017</xref>; <xref ref-type="bibr" rid="B25">Mirzaei et al., 2018</xref>; <xref ref-type="bibr" rid="B2">Bhati et al., 2020</xref>).</p>
<p>According to the type of material, the depletion layer either forms or deforms during the gas-sensing phenomenon which includes the transfer of electrons between the sensing material and the target gases. <xref ref-type="bibr" rid="B48">Zhang et al. (2016)</xref> conducted the first study in the field of Si NW based gas sensors.</p>
<p>Si NWs for gas sensing have a sensing function that is fairly comparable to a conventional semiconductor gas sensor, since a single Si NW unit has high sensitivity in a nanosensor applications. <xref ref-type="bibr" rid="B32">Peng et al. (2009)</xref> created two independent gold electrodes that have a limit of detection (LOD) of 500&#xa0;ppb against NO<sub>2</sub> and are placed on the top of a vertical Si NW array. To increase the sensitivity of the Si NW array for gas detection, each one should be connected to an electrical circuit (<xref ref-type="bibr" rid="B48">Zhang et al., 2016</xref>; <xref ref-type="bibr" rid="B26">Morganti et al., 2021</xref>). The problem has been solved by developing a number of methods for fabricating a continuous electrode on top of a Si NW array.</p>
<p>This research focuses on functionalization of Si NWs, synthesis, and the application of Si NWs as gas sensors. In this study, we have fabricated Si NWs using the MACE method and the role of quantum confinement has been established. Techniques such as ultraviolet-visible diffuse reflectance spectroscopy (UV-DRS) was used for the band-gap variation in the nano regime for the different doped Si NWs, and the noble method of gas sensing was introduced to detect NO<sub>2</sub> gas at lower concentrations.</p>
</sec>
<sec sec-type="materials|methods" id="s2">
<title>2 Materials and methods</title>
<p>In this study, the MACE technique was used to fabricate Si NWs samples of n-type Si (100) (doped with &#x223c;10<sup>3</sup> phosphorous atoms/cm<sup>3</sup>) and p-type Si (100) (doped with &#x223c;10<sup>3</sup> Boron atoms/cm<sup>3</sup>) having resistivity 1&#x2013;10&#xa0;&#x3a9;&#xa0;cm, thickness 265 &#xb1; 25&#xa0;&#x3bc;m, 2 &#xd7; 2&#xa0;cm<sup>2</sup>, keeping all other parameters constant. For the deposition process, hydrofluoric acid (HF) (Sigma-Aldrich, assay 99.9%) and silver nitrate (AgNO<sub>3</sub>) (Sigma-Aldrich, assay 99.9%) were taken in the proportion of 4.8&#xa0;M and 5&#xa0;mM, respectively, for 60 seconds at room temperature to deposit silver nanoparticles (Ag NPs). The etching solution was made by taking HF and hydrogen peroxide (H<sub>2</sub>O<sub>2</sub>) (Merck, assay 99.9%) in the proportion of 4.6 and 0.5&#xa0;M, respectively. After the deposition process, the samples were etched for a duration of 40&#xa0;min each. The etched wafers were then transferred to HNO<sub>3</sub> to dissolve the remaining Ag NPs and they were then dipped into HF solution to remove the oxide layer (Supporting Information). The samples are named as n<sub>40</sub> (n-type and etching duration of 40&#xa0;min) and p<sub>40</sub> (p-type and etching duration of 40&#xa0;min).</p>
<p>For characterizing the samples, X-ray diffraction (XRD) was recorded by using Cu (K<sub>&#x3b1;</sub>) radiation (0.154&#xa0;nm). Morphological analysis of Si NWs was carried out using a field emission scanning electron microscope (FESEM) (HITACHI SU8010). The Raman spectra were recorded using a HORIBA Jobin Youn iHR-550 spectrometer equipped with a cooled charge-coupled device (CCD) detector. An excitation line with a wavelength of 785.0&#xa0;nm was produced using an air-cooled Ar<sup>&#x2b;</sup> ion laser and the samples were exposed for 10 seconds. The laser power density was less than 10<sup>7</sup>&#xa0;mW/cm<sup>2</sup>. The dielectric and sensing properties were investigated using a LCR [inductance (L), capacitance (C), and resistance (R)] meter (HIOKI, IM3536) and a gas-sensing system, respectively.</p>
</sec>
<sec sec-type="results|discussion" id="s3">
<title>3 Results and discussion</title>
<sec id="s3-1">
<title>3.1 Structural properties</title>
<p>The XRD patterns of the Si NWs for the n-type and p-type samples are shown in <xref ref-type="fig" rid="F1">Figure 1</xref>. The XRD peak for the n<sub>40</sub> sample is observed at 2&#x3b8; &#x3d; 69.16&#xb0;, assigned (004) plane, and for the p<sub>40</sub> sample is observed at 2&#x3b8; &#x3d; 68.8&#xb0;, lattice plane (004). The sharp and narrow peak observed in the n<sub>40</sub>-type indicates improvements in crystallinity (<xref ref-type="bibr" rid="B44">Westra et al., 2010</xref>; <xref ref-type="bibr" rid="B7">Ghahramanifard et al., 2018</xref>).</p>
<fig id="F1" position="float">
<label>FIGURE 1</label>
<caption>
<p>XRD of Si NWs <bold>(A)</bold> n<sub>40</sub> and <bold>(B)</bold> p<sub>40</sub>.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g001.tif"/>
</fig>
<p>The average crystalline size of Si NWs was calculated by the Scherrer equation (<xref ref-type="bibr" rid="B24">Minin and Minin, 1994</xref>):<disp-formula id="e1">
<mml:math id="m1">
<mml:mrow>
<mml:mi mathvariant="normal">D</mml:mi>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:mrow>
<mml:mn>0.9</mml:mn>
<mml:mi>&#x3bb;</mml:mi>
</mml:mrow>
<mml:mrow>
<mml:mi mathvariant="normal">&#x3b2;</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi>cos</mml:mi>
<mml:mo>&#x2061;</mml:mo>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi mathvariant="normal">&#x3b8;</mml:mi>
</mml:mrow>
</mml:mfrac>
</mml:mrow>
</mml:math>
<label>(1)</label>
</disp-formula>where D is the crystalline size (average), &#x3b8; is the diffraction angle, &#x3bb; is the wavelength (0.154&#xa0;nm) of radiation used for the diffraction, and &#x3b2; is the full-width at half maximum (FWHM) of the observed peaks (&#x223c;0.002 for both samples). The estimated crystalline size of the Si NWs is 89&#xa0;nm and 73&#xa0;nm for the n<sub>40</sub> and p<sub>40</sub> samples, respectively.</p>
<sec id="s3-1-1">
<title>3.1.1 Micro strain</title>
<p>The XRD peak broadening occurs as a result of a deviation from the ideal crystal. This broadening can be primarily caused by the solution, crystallite size, and micro strain; the micro strain is a major factor among these and estimated as (<xref ref-type="bibr" rid="B38">Samy et al., 2019</xref>)<disp-formula id="e2">
<mml:math id="m2">
<mml:mrow>
<mml:mi>&#x3b5;</mml:mi>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:mrow>
<mml:msub>
<mml:mi mathvariant="normal">&#x3b2;</mml:mi>
<mml:mrow>
<mml:mi mathvariant="normal">h</mml:mi>
<mml:mi mathvariant="normal">k</mml:mi>
<mml:mi mathvariant="normal">l</mml:mi>
</mml:mrow>
</mml:msub>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi>Cos</mml:mi>
<mml:mo>&#x2061;</mml:mo>
<mml:mi mathvariant="normal">&#x3b8;</mml:mi>
</mml:mrow>
<mml:mn>4</mml:mn>
</mml:mfrac>
</mml:mrow>
<mml:mo>&#x2009;,</mml:mo>
</mml:math>
<label>(2)</label>
</disp-formula>where <inline-formula id="inf1">
<mml:math id="m3">
<mml:mrow>
<mml:mi>&#x3b5;</mml:mi>
<mml:mo>&#x3d;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> micro-strain, &#x3b2;<sub>hkl</sub> &#x3d; FWHM, and &#x3b8; &#x3d; diffraction angle or Bragg&#x2019;s angle. The micro strain and dislocation density are summarized in <xref ref-type="table" rid="T1">Table 1</xref>.</p>
<table-wrap id="T1" position="float">
<label>TABLE 1</label>
<caption>
<p>Summarized microstructural and elastic parameters of the Si NWs.</p>
</caption>
<table>
<thead valign="top">
<tr>
<th align="left">S. No.</th>
<th align="left">Sample name</th>
<th align="left">Average crystalline diameter (D) (nm)</th>
<th align="left">Micro strain <inline-formula id="inf2">
<mml:math id="m4">
<mml:mrow>
<mml:mi>&#x3b5;</mml:mi>
<mml:mo>(</mml:mo>
<mml:mo>&#xd7;</mml:mo>
<mml:msup>
<mml:mn>10</mml:mn>
<mml:mrow>
<mml:mo>&#x2212;</mml:mo>
<mml:mn>4</mml:mn>
</mml:mrow>
</mml:msup>
</mml:mrow>
</mml:math>
</inline-formula>)</th>
<th align="left">Dislocation density <inline-formula id="inf3">
<mml:math id="m5">
<mml:mrow>
<mml:mi>&#x3b4;</mml:mi>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mo>&#xd7;</mml:mo>
<mml:msup>
<mml:mn>10</mml:mn>
<mml:mn>15</mml:mn>
</mml:msup>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mfrac>
<mml:mrow>
<mml:mi mathvariant="normal">l</mml:mi>
<mml:mi mathvariant="normal">i</mml:mi>
<mml:mi mathvariant="normal">n</mml:mi>
<mml:mi mathvariant="normal">e</mml:mi>
<mml:mi mathvariant="normal">s</mml:mi>
</mml:mrow>
<mml:msup>
<mml:mi mathvariant="normal">m</mml:mi>
<mml:mn>2</mml:mn>
</mml:msup>
</mml:mfrac>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
</mml:mrow>
</mml:math>
</inline-formula>
</th>
<th align="left">Optical band gap (eV)</th>
</tr>
</thead>
<tbody valign="top">
<tr>
<td align="left">1</td>
<td align="left">p<sub>40</sub>
</td>
<td align="left">73</td>
<td align="left">7.8</td>
<td align="left">3</td>
<td align="left">1.89</td>
</tr>
<tr>
<td align="left">2</td>
<td align="left">n<sub>40</sub>
</td>
<td align="left">89</td>
<td align="left">4.3</td>
<td align="left">2.5</td>
<td align="left">1.64</td>
</tr>
</tbody>
</table>
</table-wrap>
</sec>
<sec id="s3-1-2">
<title>3.1.2 Dislocation density</title>
<p>Dislocation is a topological defect; it is the length of dislocation lines in a unit volume (dislocation density) of a crystalline material, i.e., defects present in the samples, mathematically expressed as (<xref ref-type="bibr" rid="B35">Ravichandran and Philominathan, 2009</xref>)<disp-formula id="e3">
<mml:math id="m6">
<mml:mrow>
<mml:mi mathvariant="normal">&#x3b4;</mml:mi>
<mml:mo>&#x3d;</mml:mo>
<mml:msup>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mfrac>
<mml:mrow>
<mml:mi mathvariant="normal">&#x3b2;</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi>cos</mml:mi>
<mml:mo>&#x2061;</mml:mo>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi mathvariant="normal">&#x3b8;</mml:mi>
</mml:mrow>
<mml:mrow>
<mml:mi mathvariant="normal">k</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi>&#x3bb;</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
</mml:mrow>
</mml:mfrac>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mn>2</mml:mn>
</mml:msup>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:mrow>
<mml:mn>1</mml:mn>
</mml:mrow>
<mml:mrow>
<mml:msup>
<mml:mi mathvariant="normal">D</mml:mi>
<mml:mn>2</mml:mn>
</mml:msup>
</mml:mrow>
</mml:mfrac>
</mml:mrow>
</mml:math>
<label>(3)</label>
</disp-formula>where &#x3b4; &#x3d; dislocation density, k &#x3d; dimensionless shape factor (its value is 0.89), and &#x3b8; and D are the same as above. The small values of &#x3b4; obtained in the current investigation support the good crystallinity of the fabricated sample i.e., Si NWs, by using the MACE method. It was found that the dislocation density and micro strain decrease with an increase in crystallite size showing lower imperfections as shown in <xref ref-type="table" rid="T1">Table 1</xref>. This might be because Si NWs have larger crystallites due to a shift in the dopant (n-type or p-type) which results in a decrease in the occurrence of grain boundaries (<xref ref-type="bibr" rid="B13">Joshi et al., 2003</xref>; <xref ref-type="bibr" rid="B1">Begum et al., 2012</xref>).</p>
</sec>
</sec>
<sec id="s3-2">
<title>3.2 Morphological properties</title>
<p>Scanning electron micrographs of Si NWs are depicted in <xref ref-type="fig" rid="F2">Figure 2</xref>. <xref ref-type="fig" rid="F2">Figures 2A&#x2013;D</xref> depict magnified 45<sup>o</sup>-tilt and cross-sectional FESEM images of Si NWs on n (Figures A,B) and p (Figures C,D) Si (100) wafers (1&#x2013;10&#xa0;&#x3a9;&#xa0;cm), keeping other parameters constant, such as chemical concentration and etching time (i.e., 40&#xa0;min). The length of the Si NWs is calculated using ImageJ software; it is approximately 10&#xa0;&#x3bc;m and 11&#xa0;&#xb5;m for n<sub>40</sub> and p<sub>40</sub> Si NWs, respectively, as shown in <xref ref-type="fig" rid="F3">Figure 3</xref>.</p>
<fig id="F2" position="float">
<label>FIGURE 2</label>
<caption>
<p>45<sup>o</sup>-tilt view and cross-sectional FESEM images of samples <bold>(A,B)</bold> for the n<sub>40</sub> Si NW <bold>(C,D)</bold> and p<sub>40</sub> Si NW, respectively.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g002.tif"/>
</fig>
<fig id="F3" position="float">
<label>FIGURE 3</label>
<caption>
<p>Average length of the Si NWs <bold>(A)</bold> n<sub>40</sub> and <bold>(B)</bold> p<sub>40</sub> using ImageJ software.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g003.tif"/>
</fig>
<p>
<xref ref-type="fig" rid="F2">Figures 2A&#x2013;D</xref> reveal that, as we deal with different doping (n<sub>40</sub> and p<sub>40</sub>), the length of deposited Si NWs increases due to sufficient oxidizing species present in the solution to oxidize the Si (<xref ref-type="bibr" rid="B30">Peng et al., 2011</xref>). The p<sub>40</sub> sample has a denser structure and has a greater length compared to the n<sub>40</sub> sample, as shown in <xref ref-type="fig" rid="F3">Figure 3</xref>.</p>
<p>The average size (diameter) estimated using ImageJ software, of the Si NWs in n<sub>40</sub> and p<sub>40</sub> are 97&#xa0;nm and 80&#xa0;nm, as shown in <xref ref-type="fig" rid="F4">Figures 4A,B</xref>, respectively. According to previous studies the variation in the shape of Si NWs is due to the occurrence of inhomogeneous nucleation of Ag on the Si (100) wafer (<xref ref-type="bibr" rid="B12">Hutagalung et al., 2017</xref>; <xref ref-type="bibr" rid="B27">Naffeti et al., 2020</xref>; <xref ref-type="bibr" rid="B36">Rouis et al., 2021</xref>). We conclude that the lower size of the p<sub>40</sub>-type Si NW compared to the n<sub>40</sub>-type Si NW is attributable to the energy band gap because as the size reduces the band gap increases. As discussed earlier, the p-type has a band gap of 1.89&#xa0;eV, while the n-type has a band gap of 1.64&#xa0;eV (<xref ref-type="bibr" rid="B36">Rouis et al., 2021</xref>). <xref ref-type="fig" rid="F4">Figure 4</xref> depicts the average diameter of n-type and p-type Si NWs, which we calculated using ImageJ software by selecting the Si NWs from the FESEM images. By selecting the diameter of all images of the Si NWs, we take the average length, which comes out as 80&#xa0;nm and 97&#xa0;nm for n-type and p-type Si NWs, respectively.</p>
<fig id="F4" position="float">
<label>FIGURE 4</label>
<caption>
<p>Average diameter of the Si NWs <bold>(A)</bold> n<sub>40</sub> and <bold>(B)</bold> p<sub>40</sub> using ImageJ software.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g004.tif"/>
</fig>
</sec>
<sec id="s3-3">
<title>3.3 Optical properties</title>
<p>The total reflectance of Si NWs onto n<sub>40</sub> Si (100) and p<sub>40</sub> Si (100) in the wavelength range of 250&#xa0;nm&#x2013;850&#xa0;nm is shown in <xref ref-type="fig" rid="F5">Figures 5A,B</xref>. It is observed that the p-type Si NW has better light-trapping than the n-type Si NW. In the n<sub>40</sub> sample, the observed reflectance was &#x223c;9% in the UV region (&#x3c;300&#xa0;nm), &#x223c;6% in the visible region (300&#x2013;700&#xa0;nm), and about 3.5% in the IR region (&#x3e;700&#xa0;nm), which is less than the percentage of reflectance given by crystalline Si (c-Si) (reflectance &#x3d; 66%). In the p<sub>40</sub> sample, the observed reflectance was &#x223c;3% in the UV region (&#x3c;300&#xa0;nm), &#x223c;4% in the visible region (300 nm&#x2013;700&#xa0;nm), and about 3% in the IR region (&#x3e;700&#xa0;nm). Moreover, the total reflectance depends upon on the length of the Si NWs; this corresponds to the reflection, which becomes lower with longer lengths of Si NWs. Total reflectance decreased for the p<sub>40</sub> sample because the charge carrier gradually increases on the textured surface (<xref ref-type="bibr" rid="B16">Kashyap et al., 2022</xref>).</p>
<fig id="F5" position="float">
<label>FIGURE 5</label>
<caption>
<p>Total reflection of the Si NWs <bold>(A)</bold> p-type and <bold>(B)</bold> n-type with an inset of the optical band gap (i) for n<sub>40</sub> and (ii) for p<sub>40</sub>.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g005.tif"/>
</fig>
<p>The Kubelka&#x2013;Munk function was used to transform reflection into absorption spectra (<xref ref-type="bibr" rid="B5">Chiu and Li, 2009</xref>; <xref ref-type="bibr" rid="B47">Yogi et al., 2017</xref>; <xref ref-type="bibr" rid="B15">Kashyap et al., 2021b</xref>):<disp-formula id="e4">
<mml:math id="m7">
<mml:mrow>
<mml:mi mathvariant="normal">F</mml:mi>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mi mathvariant="normal">R</mml:mi>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:msup>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mn>1</mml:mn>
<mml:mo>&#x2212;</mml:mo>
<mml:mi mathvariant="normal">R</mml:mi>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mn>2</mml:mn>
</mml:msup>
<mml:mrow>
<mml:mn>2</mml:mn>
<mml:mi mathvariant="normal">R</mml:mi>
</mml:mrow>
</mml:mfrac>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:mrow>
<mml:mi mathvariant="normal">K</mml:mi>
</mml:mrow>
<mml:mrow>
<mml:mi mathvariant="normal">S</mml:mi>
</mml:mrow>
</mml:mfrac>
<mml:mo>&#x2009;</mml:mo>
</mml:mrow>
</mml:math>
<label>(4)</label>
</disp-formula>where s denotes the scattering coefficient. If s &#x2192; 0 (no scattering occurs), all the light will be either transmitted or absorbed, while if k &#x2192; 0 (no absorption or transmission occur), all the light will be reflected.</p>
<p>The optical band gap can be estimated by (<xref ref-type="bibr" rid="B40">Shukla and Dixit, 2016</xref>; <xref ref-type="bibr" rid="B43">Venkatesan et al., 2019</xref>)<disp-formula id="e5">
<mml:math id="m8">
<mml:mrow>
<mml:mi mathvariant="normal">F</mml:mi>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mi mathvariant="normal">R</mml:mi>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mi mathvariant="normal">h</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi mathvariant="normal">&#x3c5;</mml:mi>
<mml:mo>&#x3d;</mml:mo>
<mml:mi mathvariant="normal">A</mml:mi>
<mml:msup>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mi mathvariant="normal">h</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi mathvariant="normal">&#x3c5;</mml:mi>
<mml:mo>&#x2212;</mml:mo>
<mml:msub>
<mml:mi mathvariant="normal">E</mml:mi>
<mml:mi mathvariant="normal">g</mml:mi>
</mml:msub>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mi mathvariant="normal">n</mml:mi>
</mml:msup>
</mml:mrow>
</mml:math>
<label>(5)</label>
</disp-formula>where F(R) is the Kubelka&#x2013;Munk function, which is equivalent to the optical absorption coefficient, E<sub>g</sub> is the optical band gap of the Si NW, A is a constant, and n is the power factor which is impacted by several electronic transitions. The plot between (F(R) h&#x3bd;)<sup>1/2</sup> vs. photon energy (E<sub>g</sub>) for the n<sub>40</sub> type- and p<sub>40</sub>-type Si NWs is depicted in the inset of <xref ref-type="fig" rid="F5">Figures 5A,B</xref>, given by (i) and (ii), respectively. The estimated values are 1.64 and 1.89&#xa0;eV for the n<sub>40</sub>- and p<sub>40</sub>-typetype samples, respectively. It is observed that the n<sub>40</sub> sample has a lesser band gap in comparison to the p<sub>40</sub> sample because the conductivity of the n<sub>40</sub> sample is higher.</p>
<p>This might be explained by a growth in crystallite size and a reduction in imperfections. The plot between (F(R) h&#x3bd;)<sup>1/2</sup> vs. photon energy (E<sub>g</sub>) for n<sub>40</sub>-type and p<sub>40</sub>-types in the inset of <xref ref-type="fig" rid="F5">Figure 5</xref> [i.e., (i) and (ii)] illustrates that the Si NWs are linear throughout a large range of photon energy. This suggests that the synthesized Si NWs have a direct optical band gap. The optical band gap of these materials can be calculated by extrapolating the linear portion of the curve to the energy axis. It is noticed that the resulting band gap falls from 1.89&#xa0;eV (for the p<sub>40</sub>-type) to 1.64&#xa0;eV (for the n<sub>40</sub>-type). According to the usual relationship between band gap and crystallite size, the band gap rises as the crystallite size decreases (summarized in <xref ref-type="table" rid="T1">Table 1</xref>). Due to the size confinement in the Si NWs, the observed values of E<sub>g</sub> are greater than the value of the bulk Si (1.12&#xa0;eV) (<xref ref-type="bibr" rid="B6">Gao et al., 2007</xref>). The variation of different parameters with crystalline size is also confirmed in <xref ref-type="fig" rid="F6">Figure 6</xref>.</p>
<fig id="F6" position="float">
<label>FIGURE 6</label>
<caption>
<p>Variation of different parameters with crystalline size. <bold>(A)</bold> Micro strain <bold>(B)</bold> Dislocation Density <bold>(C)</bold> Optical Band gap.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g006.tif"/>
</fig>
</sec>
<sec id="s3-4">
<title>3.4 Raman spectroscopy</title>
<p>The Raman spectra for the n<sub>40</sub> and p<sub>40</sub> samples are given in <xref ref-type="fig" rid="F7">Figure 7</xref>, along with a comparison with bare Si. A Raman peak at 520&#xa0;cm<sup>&#x2212;1</sup> with a FWHM of 3.5&#xa0;cm<sup>&#x2212;1</sup> of c-Si was found due to the Raman active zone center symmetry point <inline-formula id="inf4">
<mml:math id="m9">
<mml:mrow>
<mml:mi>&#x393;</mml:mi>
<mml:mo>&#x3d;</mml:mo>
<mml:mn>0</mml:mn>
</mml:mrow>
</mml:math>
</inline-formula> of the Brillouin zone. The Raman spectra for the n-type and p-type bare Si were found to be identical, with no asymmetry, as shown in <xref ref-type="fig" rid="F7">Figure 7</xref>. Also, the various parameters calculated from the Raman analysis has been given in <xref ref-type="table" rid="T2">Table 2</xref>
</p>
<fig id="F7" position="float">
<label>FIGURE 7</label>
<caption>
<p>Raman analysis for the n<sub>40</sub> and p<sub>40</sub> samples with their bare counterpart.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g007.tif"/>
</fig>
<table-wrap id="T2" position="float">
<label>TABLE 2</label>
<caption>
<p>Calculations of various parameters from the Raman analysis.</p>
</caption>
<table>
<thead valign="top">
<tr>
<th align="left">S. No.</th>
<th align="left">Sample name</th>
<th align="left">FWHM (cm<sup>&#x2212;1</sup>)</th>
<th align="left">Asymmetric ratio</th>
<th align="left">Peak position (cm<sup>&#x2212;1</sup>)</th>
</tr>
</thead>
<tbody valign="top">
<tr>
<td align="left">1</td>
<td align="left">n<sub>40</sub>
</td>
<td align="left">21</td>
<td align="left">1.3</td>
<td align="left">517</td>
</tr>
<tr>
<td align="left">2</td>
<td align="left">p<sub>40</sub>
</td>
<td align="left">15</td>
<td align="left">1.5</td>
<td align="left">518</td>
</tr>
<tr>
<td align="left">3</td>
<td align="left">Bare n-type Si</td>
<td align="left">3.5</td>
<td align="left">1</td>
<td align="left">520</td>
</tr>
<tr>
<td align="left">4</td>
<td align="left">Bare p-type Si</td>
<td align="left">3.5</td>
<td align="left">1</td>
<td align="left">520</td>
</tr>
</tbody>
</table>
</table-wrap>
<p>
<xref ref-type="fig" rid="F7">Figure 7</xref> shows that in comparison to their bulk equivalent, the Raman spectra for Si NWs are red-shifted and asymmetrically widened. An asymmetric broadening of the Raman line-shape is caused by the combination of the Fano effect and phonon confinement (<xref ref-type="bibr" rid="B19">Kumar, 2013</xref>; <xref ref-type="bibr" rid="B46">Yogi et al., 2016</xref>; <xref ref-type="bibr" rid="B39">Saxena et al., 2017</xref>; <xref ref-type="bibr" rid="B3">Bhujel et al., 2018</xref>). Analysis of the Raman line-shape characteristics such as peak position, peak asymmetry, and FWHM which also reveals the presence of phonon confinement in both samples. The wavenumber was observed at 517.4 &#xb1; 0.26, and 518.4 &#xb1; 0.18&#xa0;cm<sup>&#x2212;1</sup> for the n<sub>40</sub> and p<sub>40</sub> samples respectively, with varying asymmetry ratios due to the quantum confinement (QC) effect. This range of wavenumbers of the line is generally defined with a long-range Raman scattering line.</p>
<p>The asymmetry arises due to the presence of nano-scale size confinement (<xref ref-type="bibr" rid="B20">Li et al., 2005</xref>; <xref ref-type="bibr" rid="B19">Kumar, 2013</xref>). Phonon confinement in Si NWs is thought to be the cause of the red-shifted, asymmetrically widened Raman line-shapes, as shown in <xref ref-type="fig" rid="F7">Figure 7</xref>. The Raman line-shapes are wider on the lower energy side of the peak for n<sub>40</sub> semiconductors (asymmetry ratio 1.3), but wider on the higher energy side of the peak for p<sub>40</sub> semiconductors (asymmetry ratio 1.5), as there is more electron&#x2013;phonon confinement in the n<sub>40</sub> sample.</p>
<p>In vertically aligned Si NW arrays, metal electrodes must be linked to the ends of the Si NWs. Copper wire was used for the connecting wires and silver epoxy was used to join the wires after they had been tested and chosen for ohmic contact formation. The Si nanowire tips must be in complete contact with a metal electrode; otherwise, a short circuit would result. <xref ref-type="fig" rid="F8">Figure 8</xref> is a representation of the ohmic contact made with the fabricated samples of Si NWs.</p>
<fig id="F8" position="float">
<label>FIGURE 8</label>
<caption>
<p>Ohmic contacts with Si NWs and electrodes.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g008.tif"/>
</fig>
</sec>
<sec id="s3-5">
<title>3.5 Dielectric properties</title>
<p>The change of electrons in the presence of the electric field is responsible for the change in the capacitance of the Si NWs. The dielectric properties of the Si NWs were investigated in the form of a thin film of dimensions 2 mm <inline-formula id="inf5">
<mml:math id="m10">
<mml:mrow>
<mml:mo>&#xd7;</mml:mo>
<mml:mn>2</mml:mn>
</mml:mrow>
</mml:math>
</inline-formula>&#xa0;mm with 0.00265&#xa0;mm thickness. The electrodes were deposited on thin film using silver metal to make ohmic contact. The dielectric study of Si NWs was performed in air atmosphere. The dielectric permittivity was calculated by the following formula (<xref ref-type="bibr" rid="B28">Pawar et al., 2021</xref>):<disp-formula id="e6">
<mml:math id="m11">
<mml:mrow>
<mml:msup>
<mml:mi>&#x3b5;</mml:mi>
<mml:mo>&#x2032;</mml:mo>
</mml:msup>
<mml:mo>&#x3d;</mml:mo>
<mml:mfrac>
<mml:mrow>
<mml:mo>&#x2201;</mml:mo>
<mml:mi mathvariant="normal">t</mml:mi>
</mml:mrow>
<mml:mrow>
<mml:msub>
<mml:mi>&#x3b5;</mml:mi>
<mml:mn>0</mml:mn>
</mml:msub>
<mml:mi mathvariant="normal">A</mml:mi>
</mml:mrow>
</mml:mfrac>
<mml:mo>&#x2009;</mml:mo>
</mml:mrow>
</mml:math>
<label>(6)</label>
</disp-formula>where <inline-formula id="inf6">
<mml:math id="m12">
<mml:mrow>
<mml:msup>
<mml:mi>&#x3b5;</mml:mi>
<mml:mo>&#x2032;</mml:mo>
</mml:msup>
</mml:mrow>
</mml:math>
</inline-formula> is the dielectric permittivity of material, <inline-formula id="inf7">
<mml:math id="m13">
<mml:mrow>
<mml:msub>
<mml:mi>&#x3b5;</mml:mi>
<mml:mn>0</mml:mn>
</mml:msub>
</mml:mrow>
</mml:math>
</inline-formula> is the dielectric permittivity of the free space, <inline-formula id="inf8">
<mml:math id="m14">
<mml:mrow>
<mml:mo>&#x2201;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> is the capacitance, t is the thickness of the thin film, and A is the area of the thin film. The dielectric permittivity of Si NWs as a function of frequency with varying temperature is shown in <xref ref-type="fig" rid="F9">Figures 9A,B</xref>. The maximum dielectric permittivity of both types of Si NWs was found at low frequency, decreasing rapidly with increasing frequency then becoming almost constant after the 1&#x2013;8&#xa0;MHz frequency range. The Si NWs had a more conductive nature; hence, the dielectric permittivity of the samples was higher at low frequency because of the Debye orientational polarization (<xref ref-type="bibr" rid="B34">Rasool et al., 2012</xref>). As the temperature decreased from 110<inline-formula id="inf9">
<mml:math id="m15">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> to 30<inline-formula id="inf10">
<mml:math id="m16">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula>, the dielectric permittivity decreased and became lowest at 30<inline-formula id="inf11">
<mml:math id="m17">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula>, nearly 965 and 1,128 for n-type and p-type Si NWs, respectively, because the dipoles tend to rearrange and follow the direction of the applied electric field. The optimum value of dielectric permittivity at room temperature is a strong indication for the sensing performance of the fabricated device.</p>
<fig id="F9" position="float">
<label>FIGURE 9</label>
<caption>
<p>Dielectric permittivity and dielectric loss with varying temperature of <bold>(A,C)</bold> n<sub>40</sub> Si NWs and <bold>(B,D)</bold> p<sub>40</sub> Si NWs as a function of frequency, respectively.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g009.tif"/>
</fig>
<p>The dielectric loss showed a very low loss of energy in operation with varying frequency and time for both devices, which indicates that the devices will show enhanced sensing phenomenon for the detection of NO<sub>2</sub> gas. The dielectric loss as a function of frequency with variation of temperature is depicted in <xref ref-type="fig" rid="F9">Figures 9C,D</xref>. The dielectric loss decreased rapidly as the frequency initially increased until 1&#xa0;MHz and 0.5&#xa0;MHz for n-type and p-type Si NWs, respectively, and became constant but as the temperature increased from 30<inline-formula id="inf12">
<mml:math id="m18">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> to higher temperatures the dielectric loss increased with an increase in frequency because of the ion exchange anisotropy phenomenon (<xref ref-type="bibr" rid="B17">Khan et al., 2020</xref>), where at high temperature the ions tend to move from the barrier and produce polarization at a large scale.</p>
<p>The AC conductivity as a function of frequency with varying temperature is depicted in <xref ref-type="fig" rid="F10">Figure 10</xref>. It is clearly observed from <xref ref-type="fig" rid="F9">Figures 9A,B</xref> that as the frequency increased from 100&#xa0;Hz to 8&#xa0;MHz and the AC conductivity also increased in linear order and became highest at 8&#xa0;MHz for both types of sensing materials. The AC conductivity of the n<sub>40</sub> Si NW increased with increasing temperature from 30&#xb0;C to 110&#xb0;C and became highest at 110&#xb0;C, while this was found to be lower for the p<sub>40</sub> Si NW. The change in conductivity with increasing temperature is observed due to the hopping conduction mechanism (<xref ref-type="bibr" rid="B37">Saidi et al., 2017</xref>).</p>
<fig id="F10" position="float">
<label>FIGURE 10</label>
<caption>
<p>The AC conductivity with varying temperatures for <bold>(A)</bold> n<sub>40</sub> Si NWs and <bold>(B)</bold> p<sub>40</sub> Si NWs as a function of frequency.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g010.tif"/>
</fig>
</sec>
<sec id="s3-6">
<title>3.6 Gas-sensing properties</title>
<p>The instrument used for the gas-sensing analysis is shown in <xref ref-type="fig" rid="F11">Figure 11</xref>, which comprised a LCR meter furnace followed by a gas-sensing arrangement.</p>
<fig id="F11" position="float">
<label>FIGURE 11</label>
<caption>
<p>Schematic of a dielectric setup including an equivalent circuit, a furnace, a gas-sensing system, and a LCR meter (parallel equivalent circuit is shown in the inset).</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g011.tif"/>
</fig>
<p>The sensing mechanism behind the response toward oxidizing gas (NO<sub>2</sub>) is based on the change in resistance or conductance of the semiconductor devices in the presence of air and an oxidizing gas environment. The change in resistance as a function of frequency at 30<inline-formula id="inf13">
<mml:math id="m19">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> temperature for n<sub>40</sub>-type and p<sub>40</sub>-type Si NWs devices is depicted in <xref ref-type="fig" rid="F12">Figures 12A,C</xref>. It is observed from <xref ref-type="fig" rid="F12">Figures 12A,C</xref> that as the frequency increased the resistance decreased rapidly until 1&#xa0;MHz and then became almost constant at higher frequencies. Furthermore, the resistance of both the devices decreased as the temperature increased from 30<inline-formula id="inf14">
<mml:math id="m20">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> to 110<inline-formula id="inf15">
<mml:math id="m21">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula>, which is depicted in <xref ref-type="fig" rid="F12">Figures 12B,D</xref>. The reason behind the decrement of sensor resistance in an air atmosphere at higher temperatures is due to adsorbed oxygen molecules losing electrons at the surface of the sensor, which further move through the sensor and increase the flow of current; hence, the resistance of the sensor decreases simultaneously. The maximum resistance of both sensor devices was observed at 30<inline-formula id="inf16">
<mml:math id="m22">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> in air; hence, the gas-sensing experiments were performed at 30<inline-formula id="inf17">
<mml:math id="m23">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> with varying concentrations of oxidizing gas from lower to higher concentrations (10&#xa0;ppm&#x2013;250&#xa0;ppm).</p>
<fig id="F12" position="float">
<label>FIGURE 12</label>
<caption>
<p>Electrical resistance as a function of frequency at 30<inline-formula id="inf18">
<mml:math id="m24">
<mml:mrow>
<mml:mo>&#x2103;</mml:mo>
</mml:mrow>
</mml:math>
</inline-formula> in air atmosphere for <bold>(A)</bold> the n<sub>40</sub>-type Si NW and <bold>(C)</bold> the p<sub>40</sub>-type Si NW. Electrical resistance as a function of frequency with varying NO<sub>2</sub> concentrations for <bold>(B)</bold> the n<sub>40</sub> Si NW and <bold>(D)</bold> the p<sub>40</sub> Si NW.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g012.tif"/>
</fig>
<p>The ratio of change in resistance matter for the identification of gas response was calculated using <xref ref-type="disp-formula" rid="e7">Eqs 7</xref>, <xref ref-type="disp-formula" rid="e8">8</xref>. The objective of the present study is to investigate the change of resistance at 30&#xb0;C with varying concentrations of NO<sub>2</sub> gas for the fabrication of room-temperature detection devices.</p>
<p>
<xref ref-type="fig" rid="F11">Figures 11B,D</xref> show the change in resistance as a function of frequency with varying temperatures of the sensor devices in the presence of oxidizing gas. The change in resistance or conductance also depends on the n-type or p-type behavior of the devices. Usually, the resistance of n<sub>40</sub> type Si NWs in the presence of oxidizing gas such as NO<sub>2</sub> increases with increasing the concentration of the target gas (10&#xa0;ppm&#x2013;250&#xa0;ppm) while decreasing for p<sub>40</sub>-type Si NWs owing to the dual modulation of space charge constituency between the adsorbed oxygen with the sensing element and NO<sub>2</sub> gas atmospheres. This occurs because of the physically powerful electron-withdrawing capabilities of NO<sub>2</sub>; the accumulation of a hole in p<sub>40</sub>-type Si NW based sensors occurs due to the withdrawing of electrons, which increases the conductivity of the sensor (<xref ref-type="bibr" rid="B4">Cao et al., 2013</xref>) with increasing concentrations, while decreasing for n<sub>40</sub>-type Si NW based sensors.</p>
<p>The gas-sensing behavior of the sensors was investigated by observing the change in resistance in air and oxidizing gas atmosphere using the following relationship (<xref ref-type="bibr" rid="B29">Pawar et al., 2020</xref>):<disp-formula id="e7">
<mml:math id="m25">
<mml:mrow>
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<mml:mrow>
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</mml:mrow>
<mml:mo>&#x3d;</mml:mo>
<mml:mrow>
<mml:mo>(</mml:mo>
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</mml:mrow>
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</mml:msub>
</mml:mfrac>
</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mo>&#xd7;</mml:mo>
<mml:mn>100</mml:mn>
<mml:mo>&#x3d;</mml:mo>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
<mml:mfrac>
<mml:mrow>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">a</mml:mi>
</mml:msub>
<mml:mo>&#x2212;</mml:mo>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">g</mml:mi>
</mml:msub>
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<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
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</mml:msub>
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</mml:mrow>
<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mo>&#xd7;</mml:mo>
<mml:mn>100</mml:mn>
<mml:mi mathvariant="normal">i</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:msub>
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</mml:msub>
<mml:mo>&#x3e;</mml:mo>
<mml:msub>
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<mml:mi mathvariant="normal">a</mml:mi>
</mml:msub>
</mml:mrow>
</mml:math>
<label>(7)</label>
</disp-formula>
<disp-formula id="e8">
<mml:math id="m26">
<mml:mrow>
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<mml:mfrac>
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<mml:mo>)</mml:mo>
</mml:mrow>
<mml:mo>&#xd7;</mml:mo>
<mml:mn>100</mml:mn>
<mml:mo>&#x3d;</mml:mo>
<mml:mrow>
<mml:mo>(</mml:mo>
<mml:mrow>
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<mml:mrow>
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<mml:mo>)</mml:mo>
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<mml:mo>&#xd7;</mml:mo>
<mml:mn>100</mml:mn>
<mml:mi mathvariant="normal">i</mml:mi>
<mml:mi mathvariant="normal">f</mml:mi>
<mml:mtext>&#x2009;</mml:mtext>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">a</mml:mi>
</mml:msub>
<mml:mo>&#x3e;</mml:mo>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">g</mml:mi>
</mml:msub>
</mml:mrow>
</mml:math>
<label>(8)</label>
</disp-formula>where R (%) is the sensitivity of the target gas, <inline-formula id="inf19">
<mml:math id="m27">
<mml:mrow>
<mml:mo>&#x2206;</mml:mo>
<mml:mi mathvariant="normal">R</mml:mi>
</mml:mrow>
</mml:math>
</inline-formula> is the change in resistance, and <inline-formula id="inf20">
<mml:math id="m28">
<mml:mrow>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">a</mml:mi>
</mml:msub>
<mml:mtext>&#x2009;</mml:mtext>
<mml:mi mathvariant="normal">a</mml:mi>
<mml:mi mathvariant="normal">n</mml:mi>
<mml:mi mathvariant="normal">d</mml:mi>
</mml:mrow>
</mml:math>
</inline-formula> <inline-formula id="inf21">
<mml:math id="m29">
<mml:mrow>
<mml:msub>
<mml:mi mathvariant="normal">R</mml:mi>
<mml:mi mathvariant="normal">g</mml:mi>
</mml:msub>
</mml:mrow>
</mml:math>
</inline-formula> are the resistance of the air and the target gas, respectively. n<sub>40</sub>-type and p<sub>40</sub>-type Si NW based sensors were used for the detection of oxidizing gas such as NO<sub>2</sub>.</p>
<p>The gas-sensing response as the function of frequency with varying gas concentrations from 10&#xa0;ppm to 250&#xa0;ppm is shown in <xref ref-type="fig" rid="F13">Figures 13A,B</xref>. The sensing response of the n<sub>40</sub>-type Si NW based sensor showed that the response toward NO<sub>2</sub> gas initially decreased with increasing frequency, reaching a minimum at a certain frequency and then increasing again at higher frequencies. The concentration of the oxidizing gas introduced in the gas-sensing unit, varying from 10&#xa0;ppm to 250&#xa0;ppm, exhibited an excellent gas response at lower concentrations, which is at 50&#xa0;ppm, and a minimum response at higher concentrations at all frequency ranges because the fabricated sensor had a small dimension suitable to detect gas precisely at lower concentrations, but at higher concentrations, the adsorbed layer of the O<sup>&#x2212;2</sup> and gas-interacting surface was saturated; hence, the free electrons were not available in the sensor element, which can propagate current through the device, and as a result the resistance increased rapidly, which reduced the gas response of the sensor, while decreasing in the case of the p<sub>40</sub>-type Si NW sensor. In the presence of NO<sub>2</sub> gas, as the frequency increased, the resistance of the sensing device decreased due to saturation polarization which improved the gas sensitivity. A chemiresistive sensor&#x2019;s sensitivity is a resistance-dependent mechanism as the maximum change in resistance was observed in the presence of NO<sub>2</sub> gas, while in the air atmosphere, the gas response increased.</p>
<fig id="F13" position="float">
<label>FIGURE 13</label>
<caption>
<p>Gas-sensing response as a function of frequency with varying concentrations for <bold>(A)</bold> the n<sub>40</sub> Si NW and <bold>(B)</bold> the p<sub>40</sub> Si NW and at fixed frequencies with varying NO<sub>2</sub> gas concentrations for <bold>(C)</bold> the n<sub>40</sub> Si NW and <bold>(D)</bold> the p<sub>40</sub> Si NW at room temperature, respectively.</p>
</caption>
<graphic xlink:href="fmats-09-1022317-g013.tif"/>
</fig>
<p>The gas response R (%) of n<sub>40</sub>-type and p<sub>40</sub>-type Si NW sensors as a function of concentrations at specific frequencies of 1, 4, and 8&#xa0;MHz is depicted in <xref ref-type="fig" rid="F13">Figures 13C,D</xref>.</p>
<p>
<xref ref-type="fig" rid="F13">Figure 13C</xref> shows the gas response of the n<sub>40</sub>-type Si NW based gas sensor, with the maximum sensing performance at 50&#xa0;ppm found to be 35%, 63%, and 68% at 1, 4, and 8&#xa0;MHz, respectively, while this was 75%, 68%, and 62% for the p<sub>40</sub>-type Si NW based sensor, as illustrated in <xref ref-type="fig" rid="F10">Figure 10D</xref>. The aforementioned results revealed that the p<sub>40</sub>-type Si NW based sensor is the best for the detection of NO<sub>2</sub> gas at room temperature and at lower frequencies, while the n<sub>40</sub>-type Si NW-based sensor is the best for the detection of NO<sub>2</sub> gas at room temperature and higher frequencies.</p>
</sec>
</sec>
<sec sec-type="conclusion" id="s4">
<title>Conclusion</title>
<p>The low-cost MACE method was utilized for synthesizing Si NWs. The structural analysis of the synthesized Si NWs confirmed that as the crystallite size increased, the dislocation density decreased simultaneously. The morphological analysis showed that the array of Si NWs had a length of approximately 10 &#xb1; 0.5 and 11 &#xb1; 0.06&#xa0;&#xb5;m and an approximate average size (diameter) of 97 &#xb1; 5&#xa0;nm and 80 &#xb1; 0.001&#xa0;nm for the n<sub>40</sub> and p<sub>40</sub> samples, respectively. The band gap of the synthesized Si NWs was observed to decrease from 1.89&#xa0;eV (for the p-type) to 1.64&#xa0;eV (for the n-type) which is a remarkable outcome for gas-sensing applications. Due to greater electron&#x2013;phonon confinement in the n<sub>40</sub> sample, the Raman line-shape was wider on the lower energy side of the peak for the n<sub>40</sub>-type semiconductor (asymmetry ratio: 1.3) but was wider on the higher energy side of the peak for the p<sub>40</sub>-type semiconductor (asymmetry ratio: 1.5). The dielectric study confirmed the lower dielectric values of the synthesized Si NWs at room temperature, which is a strong indication for the sensing performance of the fabricated device. Regarding the gas-sensing response of the n<sub>40</sub>-type Si NW based gas sensor, the maximum sensing performance at 50&#xa0;ppm was found to be 35%, 63%, and 68% at 1, 4, and 8&#xa0;MHz, respectively, while this was 75%, 68%, and 62% for the p<sub>40</sub>-type Si NW based sensor, which confirms that the p<sub>40</sub>-type Si NW based sensor is the best for the detection of NO<sub>2</sub> gas at room temperature and lower frequencies, while the n<sub>40</sub>-type Si NW-based sensor is the best for the detection of NO<sub>2</sub> gas at room temperature and higher frequencies.</p>
</sec>
</body>
<back>
<sec sec-type="data-availability" id="s5">
<title>Data availability statement</title>
<p>The raw data supporting the conclusions of this article will be made available by the authors, without undue reservation.</p>
</sec>
<sec id="s6">
<title>Author contributions</title>
<p>VK: conceptualization, methodology, writing&#x2014;review and editing, validation, resources, and data curation. HP: writing&#x2014;review and editing, validation, resources, and data curation. CK: formal analysis and visualization. NC: supervision. KS: supervision and investigation.</p>
</sec>
<ack>
<p>We would like to thank to Dr. Deepshikha Rathore (ASAS, Amity University, Jaipur, Rajasthan, India) for the use of the dielectric and gas-sensing facilities. we also acknowledge financial support via Senior Research Fellowship (SRF) from the University Grants Commission (UGC), India. The author acknowledges the Sophisticated Analytical Instrumentation Facility (SAIF) and Prof. G. S. S. Saini (Department of Physics, Panjab University, Chandigarh, India) for using and recording the Raman spectroscopy facility.</p>
</ack>
<sec sec-type="COI-statement" id="s7">
<title>Conflict of interest</title>
<p>The authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest.</p>
</sec>
<sec sec-type="disclaimer" id="s8">
<title>Publisher&#x2019;s note</title>
<p>All claims expressed in this article are solely those of the authors and do not necessarily represent those of their affiliated organizations, or those of the publisher, the editors, and the reviewers. Any product that may be evaluated in this article, or claim that may be made by its manufacturer, is not guaranteed or endorsed by the publisher.</p>
</sec>
<sec id="s9">
<title>Supplementary material</title>
<p>The Supplementary Material for this article can be found online at: <ext-link ext-link-type="uri" xlink:href="https://www.frontiersin.org/articles/10.3389/fmats.2022.1022317/full#supplementary-material">https://www.frontiersin.org/articles/10.3389/fmats.2022.1022317/full&#x23;supplementary-material</ext-link>
</p>
<supplementary-material xlink:href="DataSheet1.pdf" id="SM1" mimetype="application/pdf" xmlns:xlink="http://www.w3.org/1999/xlink"/>
</sec>
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