AUTHOR=Liu Yingbo , Li Haiou , Li Yue , Li Haisheng , Hao Yuxiang , Qin Liangpeng , Yang Jiayu 

TITLE=High-speed electro-optic modulator with group velocity matching on silicon substrate

JOURNAL=Frontiers in Bioengineering and Biotechnology

VOLUME=Volume 13 - 2025

YEAR=2025

URL=https://www.frontiersin.org/journals/bioengineering-and-biotechnology/articles/10.3389/fbioe.2025.1626017

DOI=10.3389/fbioe.2025.1626017

ISSN=2296-4185

ABSTRACT=Electro-optic modulators with low driving voltage and wide bandwidth are critical for advanced analog and digital communication systems. To achieve high-speed thin-film lithium niobate (TFLN) electro-optic modulators on silicon substrates, this work proposes a hybrid-loaded T type-U type traveling-wave electrode structure (TU-TWEs). The core of TU-TWEs in the introduction of an inductance compensation mechanism, which can effectively reduce the microwave refractive index and weaken the “slow light” effect, thereby matching the group velocity of light with the microwave velocity. We demonstrate a high-speed TFLN electro-optic modulator on a silicon substrate, with an electro-optic bandwidth greater than 110 GHz and a half-wave voltage of 1.35 V.