Front. Chem. Frontiers in Chemistry Front. Chem. 2296-2646 Frontiers Media S.A. 1118819 10.3389/fchem.2022.1118819 Chemistry Correction Corrigendum: Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water Xu et al. 10.3389/fchem.2022.1118819 Xu Rui 1 Zhou Zhongchao 1 Li Jing 1 Zhang Xu 1 Zhu Yuanyuan 1 Xiao Hongping 1 * Xu Lina 1 * Ding Yihong 1 Li Aidong 2 Fang Guoyong 1 * 1 Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou, China 2 National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing, China

Edited and reviewed by: Sudip Pan, Jilin University, China

 *Correspondence: Hongping Xiao, hp_xiao@wzu.edu.cn; Lina Xu, xulina@wzu.edu.cn; Guoyong Fang, fanggy@wzu.edu.cn

This article was submitted to Theoretical and Computational Chemistry, a section of the journal Frontiers in Chemistry

 20 12 2022 2022 10 1118819 08 12 2022 14 12 2022 Copyright © 2022 Xu, Zhou, Li, Zhang, Zhu, Xiao, Xu, Ding, Li and Fang. 2022 Xu, Zhou, Li, Zhang, Zhu, Xiao, Xu, Ding, Li and Fang

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 A Corrigendum on Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water by Xu R, Zhou Z, Li J, Zhang X, Zhu Y, Xiao H, Xu L, Ding Y, Li A and Fang G (2022). Front. Chem. 10:1035902. doi: 10.3389/fchem.2022.1035902 zirconium oxide atomic layer deposition reaction mechanism tetrakis(dimethylamino)zirconium density functional theory

In the original article, the Supplementary material contained “Data Sheet 1”, which was not intended for publication. The incorrect file has been unpublished, and the remaining file, previously “Data Sheet 2”, has been renamed as “Data Sheet 1”.

The authors apologize for this error and state that this does not change the scientific conclusions of the article in any way. The original article has been updated.

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