AUTHOR=Miao Qian , Liu Yang , Tan Jiu Bin 

TITLE=Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method

JOURNAL=Frontiers in Energy Research

VOLUME=Volume 10 - 2022

YEAR=2022

URL=https://www.frontiersin.org/journals/energy-research/articles/10.3389/fenrg.2022.949782

DOI=10.3389/fenrg.2022.949782

ISSN=2296-598X

ABSTRACT=The performance of actuator is becoming increasingly important in ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters can not provide enough force for the next-generation motion stage in the semiconductor industry since it achieve physical limit of power factor. To tackle this problem, this paper develops a novel driven approach and its control strategy for high-dynamic stages. Explicitly, the proposed method utilizes linear reluctance motor as actuator, which could promote the continuous thrust significantly. A heuristic optimization based Bouc-wen model is established to describe the nonlinear behavior of the novel actuator. And a flux control algorithm based on integral sliding mode is derived and adjusted for precision thrust generation. Comparative simulations on a specific linear reluctance motor confirm the effectiveness and superiority of the proposed method, and show that it has the ability to conquer the force nonlinearity of the novel actuator.