AUTHOR=Liu Shuxin , Jiang Huhai , Huang Xiaohong , She Junchao , Si Chen , Lv Shengqiang 

TITLE=Precision Compensation Control of a Piezo-Scanning Mechanism

JOURNAL=Frontiers in Materials

VOLUME=Volume 9 - 2022

YEAR=2022

URL=https://www.frontiersin.org/journals/materials/articles/10.3389/fmats.2022.852642

DOI=10.3389/fmats.2022.852642

ISSN=2296-8016

ABSTRACT=In this paper, a controller based on two compensators is developed to support a two-axis piezo-scanning mechanism for tracking control. The hysteresis compensator is designed based on a Prandtl-Ishlinskii hysteresis model in order to reduce the nonlinear hysteresis effect of piezoelectric actuator. Furthermore, to compensate for uncertainties due to parametric variations, hysteresis compensated error and un-modeled dynamics, the uncertainties compensator based on neural network disturbance observer is proposed. The developed controller is verified control performance by experiment. Experimental results show that the proposed hybrid controller can overcome the mentioned nonlinear and uncertainty efficiently and preserve good positioning accuracy.