AUTHOR=Ogi Jun , Kato Yuri , Nakashima Yusaku , Ikeda Kenji , Jingu Motoko , Matoba Yoshihisa , Kimizuka Naohiko , Yamane Chigusa , Maehara Masataka , Kishimoto Takuya , Hashimoto Shigeki , Matsui Eriko , Oike Yusuke 

TITLE=A 4.8-μVrms-Noise CMOS-Microelectrode Array With Density-Scalable Active Readout Pixels via Disaggregated Differential Amplifier Implementation

JOURNAL=Frontiers in Neuroscience

VOLUME=13

YEAR=2019

URL=https://www.frontiersin.org/journals/neuroscience/articles/10.3389/fnins.2019.00234

DOI=10.3389/fnins.2019.00234

ISSN=1662-453X

ABSTRACT=<p>We demonstrate a 4.8-μV<sub>rms</sub> noise microelectrode array (MEA) based on the complementary-metal-oxide-semiconductor active-pixel-sensors readout technique with disaggregated differential amplifier implementation. The circuit elements of the differential amplifier are divided into a readout pixel, a reference pixel, and a column circuit. This disaggregation contributes to the small area of the readout pixel, which is less than 81 μm<sup>2</sup>. We observed neuron signals around 100 μV with 432 electrodes in a fabricated prototype chip. The implementation has technological feasibility of up to 12-μm-pitch electrode density and 6,912 readout channels for high-spatial resolution mapping of neuron network activity.</p>