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<article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" article-type="brief-report">
<front>
<journal-meta>
<journal-id journal-id-type="publisher-id">Front. Phys.</journal-id>
<journal-title>Frontiers in Physics</journal-title>
<abbrev-journal-title abbrev-type="pubmed">Front. Phys.</abbrev-journal-title>
<issn pub-type="epub">2296-424X</issn>
<publisher>
<publisher-name>Frontiers Media S.A.</publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id pub-id-type="doi">10.3389/fphy.2021.606011</article-id>
<article-categories>
<subj-group subj-group-type="heading">
<subject>Physics</subject>
<subj-group>
<subject>Brief Research Report</subject>
</subj-group>
</subj-group>
</article-categories>
<title-group>
<article-title>Fractal Pull-in Stability Theory for Microelectromechanical Systems</article-title>
</title-group>
<contrib-group>
<contrib contrib-type="author" corresp="yes">
<name><surname>Tian</surname> <given-names>Dan</given-names></name>
<xref ref-type="aff" rid="aff1"><sup>1</sup></xref>
<xref ref-type="corresp" rid="c001"><sup>&#x0002A;</sup></xref>
<uri xlink:href="http://loop.frontiersin.org/people/1086306/overview"/>
</contrib>
<contrib contrib-type="author">
<name><surname>He</surname> <given-names>Chun-Hui</given-names></name>
<xref ref-type="aff" rid="aff2"><sup>2</sup></xref>
</contrib>
<contrib contrib-type="author" corresp="yes">
<name><surname>He</surname> <given-names>Ji-Huan</given-names></name>
<xref ref-type="aff" rid="aff3"><sup>3</sup></xref>
<xref ref-type="aff" rid="aff4"><sup>4</sup></xref>
<xref ref-type="corresp" rid="c002"><sup>&#x0002A;</sup></xref>
<uri xlink:href="http://loop.frontiersin.org/people/138227/overview"/>
</contrib>
</contrib-group>
<aff id="aff1"><sup>1</sup><institution>School of Science, Xi&#x00027;an University of Architecture and Technology</institution>, <addr-line>Xi&#x00027;an</addr-line>, <country>China</country></aff>
<aff id="aff2"><sup>2</sup><institution>School of Civil Engineering, Xi&#x00027;an University of Architecture and Technology</institution>, <addr-line>Xi&#x00027;an</addr-line>, <country>China</country></aff>
<aff id="aff3"><sup>3</sup><institution>School of Mathematics and Information Science, Henan Polytechnic University</institution>, <addr-line>Jiaozuo</addr-line>, <country>China</country></aff>
<aff id="aff4"><sup>4</sup><institution>National Engineering Laboratory for Modern Silk, College of Textile and Clothing Engineering, Soochow University</institution>, <addr-line>Suzhou</addr-line>, <country>China</country></aff>
<author-notes>
<fn fn-type="edited-by"><p>Edited by: Hamid M. Sedighi, Shahid Chamran University of Ahvaz, Iran</p></fn>
<fn fn-type="edited-by"><p>Reviewed by: Jamal Zare, Shahrekord University, Iran; Hijaz Ahmad, University of Engineering and Technology, Peshawar, Pakistan</p></fn>
<corresp id="c001">&#x0002A;Correspondence: Dan Tian <email>tiandan&#x00040;xauat.edu.cn</email></corresp>
<corresp id="c002">Ji-Huan He <email>hejihuan&#x00040;suda.edu.cn</email></corresp>
<fn fn-type="other" id="fn001"><p>This article was submitted to Mathematical and Statistical Physics, a section of the journal Frontiers in Physics</p></fn></author-notes>
<pub-date pub-type="epub">
<day>31</day>
<month>03</month>
<year>2021</year>
</pub-date>
<pub-date pub-type="collection">
<year>2021</year>
</pub-date>
<volume>9</volume>
<elocation-id>606011</elocation-id>
<history>
<date date-type="received">
<day>14</day>
<month>09</month>
<year>2020</year>
</date>
<date date-type="accepted">
<day>08</day>
<month>03</month>
<year>2021</year>
</date>
</history>
<permissions>
<copyright-statement>Copyright &#x000A9; 2021 Tian, He and He.</copyright-statement>
<copyright-year>2021</copyright-year>
<copyright-holder>Tian, He and He</copyright-holder>
<license xlink:href="http://creativecommons.org/licenses/by/4.0/"><p>This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) and the copyright owner(s) are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.</p></license> </permissions>
<abstract><p>Pull-in instability was an important phenomenon in microelectromechanical systems (MEMS). In the past, MEMS were usually assumed to work in an ideal environment. But in the real circumstances, MEMS often work in dust-filled air, which is equivalent to working in porous media, that&#x00027;s mean fractal space. In this paper, we studied MEMS in fractal space and established the corresponding model. At the same time, we can control the occurrence time and stable time of pull-in by adjusting the value of the fractal index, and obtain a stable pull-in phenomenon.</p></abstract>
<kwd-group>
<kwd>micro-electromechanical systems</kwd>
<kwd>pull-in</kwd>
<kwd>fractal space</kwd>
<kwd>porous medium</kwd>
<kwd>fractal derivative</kwd>
</kwd-group>
<counts>
<fig-count count="3"/>
<table-count count="0"/>
<equation-count count="8"/>
<ref-count count="29"/>
<page-count count="4"/>
<word-count count="1908"/>
</counts>
</article-meta>
</front>
<body>
<sec sec-type="intro" id="s1">
<title>Introduction</title>
<p>In recent years, Microelectromechanical systems (MEMS) has received extensive attention from scientific researchers. In the operation of MEMS, a pull-in effect will occur. The pull-in voltage analysis of the electrostatic drive device is of great significance to the efficient operation and reliability of the device. Many literatures have conducted a lot of analysis on the dynamic pull-in of MEMS models of linear materials [<xref ref-type="bibr" rid="B1">1</xref>&#x02013;<xref ref-type="bibr" rid="B5">5</xref>]. There are many materials used to prepare electrostatic MEMS devices, and among many materials, graphene is considered an excellent material for these devices [<xref ref-type="bibr" rid="B6">6</xref>].</p>
<p>Under normal circumstances, the MEMS we consider are in a smooth medium, which can also be called a continuous space. However, with the pollution of the environment, these electronic devices have to work in a porous medium full of particles. Under such conditions, it will inevitably affect the work of electronic devices, and thus also affect the pull-in. So, in this case, we need to analyze MEMS in fractal space. Fractal theory is an excellent tool for dealing with various mathematical problems and some physical phenomena in porous media [<xref ref-type="bibr" rid="B7">7</xref>&#x02013;<xref ref-type="bibr" rid="B9">9</xref>]. Because of the diversity application of fractal, it is widely used in various fields [<xref ref-type="bibr" rid="B10">10</xref>&#x02013;<xref ref-type="bibr" rid="B22">22</xref>].</p>
<p>In this paper, we analyzed MEMS in the fractal space and established the corresponding fractal model. After that, we explored its impact on pull-in by selecting different fractional derivatives, and realized the effective control of timing for pull-in occurrence, and obtain a stable pull-in condition.</p></sec>
<sec id="s2">
<title>Fractal MEMS Model</title>
<p>Consider a dual parallel plate model driven by electrostatic forces. The graphene ribbon with a cross-sectional area of <italic>A</italic>&#x02032; is connected to the movable and fixed base components, and the initial distance is <italic>h</italic>. The movable part is a plate with area <italic>A</italic> and mass m, as shown in <xref ref-type="fig" rid="F1">Figure 1</xref>. Graphene materials follow the Equation (1) [<xref ref-type="bibr" rid="B23">23</xref>, <xref ref-type="bibr" rid="B24">24</xref>],</p>
<disp-formula id="E1"><label>(1)</label><mml:math id="M1"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:mi>&#x003C3;</mml:mi><mml:mo>=</mml:mo><mml:mi>E</mml:mi><mml:mi>&#x003B5;</mml:mi><mml:mo>&#x0002B;</mml:mo><mml:mi>D</mml:mi><mml:msup><mml:mrow><mml:mi>&#x003B5;</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>where &#x003C3;, &#x003B5;, <italic>E</italic> represent the axial stress, axial strain, Young&#x00027;s modulus, and elastic stiffness constant, respectively. The moving part is affected by the restoring force <italic>Fr</italic>produced by the axial displacement of the graphene belt and the electrostatic force <italic>Fe</italic> produced by the applied voltage <italic>V</italic>. According to Equation (1), <italic>Fr</italic> and <italic>Fe</italic> can be write as [<xref ref-type="bibr" rid="B1">1</xref>, <xref ref-type="bibr" rid="B6">6</xref>],</p>
<disp-formula id="E2"><label>(2)</label><mml:math id="M2"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:mrow><mml:msub><mml:mi>F</mml:mi><mml:mi>r</mml:mi></mml:msub><mml:mo>=</mml:mo><mml:mo>&#x02212;</mml:mo><mml:msup><mml:mi>A</mml:mi><mml:mo>&#x02032;</mml:mo></mml:msup><mml:mi>E</mml:mi><mml:mfrac><mml:mover accent='true'><mml:mi>u</mml:mi><mml:mo>&#x002DC;</mml:mo></mml:mover><mml:mi>L</mml:mi></mml:mfrac><mml:mo>+</mml:mo><mml:msup><mml:mi>A</mml:mi><mml:mo>&#x02032;</mml:mo></mml:msup><mml:mi>D</mml:mi><mml:mfrac><mml:mover accent='true'><mml:mi>u</mml:mi><mml:mo>&#x002DC;</mml:mo></mml:mover><mml:mi>L</mml:mi></mml:mfrac><mml:mrow><mml:mo>|</mml:mo> <mml:mrow><mml:mfrac><mml:mover accent='true'><mml:mi>u</mml:mi><mml:mo>&#x002DC;</mml:mo></mml:mover><mml:mi>L</mml:mi></mml:mfrac></mml:mrow> <mml:mo>|</mml:mo></mml:mrow><mml:mo>,</mml:mo></mml:mrow></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<disp-formula id="E3"><label>(3)</label><mml:math id="M3"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:msub><mml:mrow><mml:mi>F</mml:mi></mml:mrow><mml:mrow><mml:mi>e</mml:mi></mml:mrow></mml:msub><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:msub><mml:mrow><mml:mi>&#x003B5;</mml:mi></mml:mrow><mml:mrow><mml:mn>0</mml:mn></mml:mrow></mml:msub><mml:mi>A</mml:mi><mml:msup><mml:mrow><mml:mi>V</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow><mml:mrow><mml:mn>2</mml:mn><mml:msup><mml:mrow><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mi>h</mml:mi><mml:mo>-</mml:mo><mml:mi>&#x00169;</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>Where &#x003B5;<sub>0</sub> is electric emissivity. Using Newton&#x00027;s second law of motion, the equation of motion of the moving part can be expressed as,</p>
<disp-formula id="E4"><label>(4)</label><mml:math id="M4"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:mi>m</mml:mi><mml:mfrac><mml:mrow><mml:msup><mml:mrow><mml:mi>d</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup><mml:mi>&#x00169;</mml:mi></mml:mrow><mml:mrow><mml:mi>d</mml:mi><mml:msup><mml:mrow><mml:mover accent="true"><mml:mrow><mml:mi>t</mml:mi></mml:mrow><mml:mo>&#x0007E;</mml:mo></mml:mover></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>&#x0002B;</mml:mo><mml:msup><mml:mrow><mml:mi>A</mml:mi></mml:mrow><mml:mrow><mml:mi>&#x02032;</mml:mi></mml:mrow></mml:msup><mml:mi>E</mml:mi><mml:mfrac><mml:mrow><mml:mi>&#x00169;</mml:mi></mml:mrow><mml:mrow><mml:mi>L</mml:mi></mml:mrow></mml:mfrac><mml:mo>-</mml:mo><mml:msup><mml:mi>A</mml:mi><mml:mo>&#x02032;</mml:mo></mml:msup><mml:mi>D</mml:mi><mml:mfrac><mml:mover accent='true'><mml:mi>u</mml:mi><mml:mo>&#x002DC;</mml:mo></mml:mover><mml:mi>L</mml:mi></mml:mfrac><mml:mrow><mml:mo>|</mml:mo> <mml:mrow><mml:mfrac><mml:mover accent='true'><mml:mi>u</mml:mi><mml:mo>&#x002DC;</mml:mo></mml:mover><mml:mi>L</mml:mi></mml:mfrac></mml:mrow> <mml:mo>|</mml:mo></mml:mrow><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:msub><mml:mrow><mml:mi>&#x003B5;</mml:mi></mml:mrow><mml:mrow><mml:mn>0</mml:mn></mml:mrow></mml:msub><mml:mi>A</mml:mi><mml:msup><mml:mrow><mml:mi>V</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow><mml:mrow><mml:mn>2</mml:mn><mml:msup><mml:mrow><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mi>h</mml:mi><mml:mo>-</mml:mo><mml:mi>&#x00169;</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>Equation (4) can be transformed as Equation (5),</p>
<disp-formula id="E5"><label>(5)</label><mml:math id="M5"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:msup><mml:mrow><mml:mi>u</mml:mi></mml:mrow><mml:mrow><mml:mo>&#x02033;</mml:mo></mml:mrow></mml:msup><mml:mo>&#x0002B;</mml:mo><mml:mi>u</mml:mi><mml:mo>-</mml:mo><mml:mi>a</mml:mi><mml:mi>u</mml:mi><mml:mo stretchy="true">|</mml:mo><mml:mi>u</mml:mi><mml:mo stretchy="true">|</mml:mo><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:mi>k</mml:mi></mml:mrow><mml:mrow><mml:msup><mml:mrow><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mn>1</mml:mn><mml:mo>-</mml:mo><mml:mi>u</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>Where <inline-formula><mml:math id="M6"><mml:mi>u</mml:mi><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:mi>&#x00169;</mml:mi></mml:mrow><mml:mrow><mml:mi>h</mml:mi></mml:mrow></mml:mfrac></mml:math></inline-formula>, <inline-formula><mml:math id="M7"><mml:mi>t</mml:mi><mml:mo>=</mml:mo><mml:mover accent="true"><mml:mrow><mml:mi>t</mml:mi></mml:mrow><mml:mo stretchy="false">&#x0007E;</mml:mo></mml:mover><mml:msqrt><mml:mrow><mml:mfrac><mml:mrow><mml:msup><mml:mrow><mml:mi>A</mml:mi></mml:mrow><mml:mrow><mml:mi>&#x02032;</mml:mi></mml:mrow></mml:msup><mml:mi>E</mml:mi></mml:mrow><mml:mrow><mml:mi>m</mml:mi><mml:mi>L</mml:mi></mml:mrow></mml:mfrac></mml:mrow></mml:msqrt></mml:math></inline-formula>, <inline-formula><mml:math id="M8"><mml:mi>a</mml:mi><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:mi>h</mml:mi><mml:mi>D</mml:mi></mml:mrow><mml:mrow><mml:mi>L</mml:mi><mml:mi>E</mml:mi></mml:mrow></mml:mfrac></mml:math></inline-formula>, <inline-formula><mml:math id="M9"><mml:mi>k</mml:mi><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:msub><mml:mrow><mml:mi>&#x003B5;</mml:mi></mml:mrow><mml:mrow><mml:mn>0</mml:mn></mml:mrow></mml:msub><mml:mi>A</mml:mi><mml:mi>L</mml:mi><mml:msup><mml:mrow><mml:mi>V</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow><mml:mrow><mml:mn>2</mml:mn><mml:msup><mml:mrow><mml:mi>A</mml:mi></mml:mrow><mml:mrow><mml:mi>&#x02032;</mml:mi></mml:mrow></mml:msup><mml:mi>E</mml:mi><mml:msup><mml:mrow><mml:mi>h</mml:mi></mml:mrow><mml:mrow><mml:mn>3</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac></mml:math></inline-formula>.</p>
<fig id="F1" position="float">
<label>Figure 1</label>
<caption><p>Graphene MEMS in the porous medium.</p></caption>
<graphic xlink:href="fphy-09-606011-g0001.tif"/>
</fig>
<p>In the fractal space, the fractal derivative is defined as [<xref ref-type="bibr" rid="B25">25</xref>&#x02013;<xref ref-type="bibr" rid="B29">29</xref>],</p>
<disp-formula id="E6"><label>(6)</label><mml:math id="M10"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:msubsup><mml:mrow><mml:mi>D</mml:mi></mml:mrow><mml:mrow><mml:mi>F</mml:mi></mml:mrow><mml:mrow><mml:mi>&#x003B1;</mml:mi></mml:mrow></mml:msubsup><mml:mi>h</mml:mi><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mi>&#x003B8;</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:msub><mml:mrow><mml:mi>d</mml:mi></mml:mrow><mml:mrow><mml:mi>g</mml:mi></mml:mrow></mml:msub><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mi>v</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:msub><mml:mrow><mml:mi>d</mml:mi></mml:mrow><mml:mrow><mml:mi>v</mml:mi></mml:mrow></mml:msub></mml:mrow></mml:mfrac><mml:msub><mml:mrow><mml:mo>&#x02223;</mml:mo></mml:mrow><mml:mrow><mml:mi>v</mml:mi><mml:mo>=</mml:mo><mml:mi>j</mml:mi><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mi>&#x003B8;</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow></mml:msub></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>If the Micro-electromechanical system work in the porous medium as shown in <xref ref-type="fig" rid="F1">Figure 1</xref>, we should consider it in fractal place. So, based on Equation (5), the fractal MEMS can be written as,</p>
<disp-formula id="E7"><label>(7)</label><mml:math id="M11"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:mfrac><mml:mrow><mml:msup><mml:mrow><mml:mi>d</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup><mml:mi>u</mml:mi></mml:mrow><mml:mrow><mml:mi>d</mml:mi><mml:msup><mml:mrow><mml:mi>t</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn><mml:mi>&#x003B1;</mml:mi></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>&#x0002B;</mml:mo><mml:mi>u</mml:mi><mml:mo>-</mml:mo><mml:mi>a</mml:mi><mml:mi>u</mml:mi><mml:mo>|</mml:mo><mml:mi>u</mml:mi><mml:mo>|</mml:mo><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:mi>k</mml:mi></mml:mrow><mml:mrow><mml:msup><mml:mrow><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mn>1</mml:mn><mml:mo>-</mml:mo><mml:mi>u</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>We assume the initial conditions are <italic>u</italic>(0) &#x0003D; 0, <italic>u</italic>&#x02032;(0) &#x0003D; 0.</p></sec>
<sec id="s3">
<title>Results and Discussion</title>
<p>In Equation (7), when <italic>a</italic> and k take different values, it will correspond to different equations. It is worth noting that only in the presence of electrostatic force, that is <italic>a</italic> &#x0003D; 0, under steady-state conditions, our model is simplified to the well-known Nathan model or parallel plate capacitor model [<xref ref-type="bibr" rid="B6">6</xref>].</p>
<disp-formula id="E8"><label>(8)</label><mml:math id="M12"><mml:mtable class="eqnarray" columnalign="right center left"><mml:mtr><mml:mtd><mml:mfrac><mml:mrow><mml:msup><mml:mrow><mml:mi>d</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup><mml:mi>u</mml:mi></mml:mrow><mml:mrow><mml:mi>d</mml:mi><mml:msup><mml:mrow><mml:mi>t</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn><mml:mi>&#x003B1;</mml:mi></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>&#x0002B;</mml:mo><mml:mi>u</mml:mi><mml:mo>=</mml:mo><mml:mfrac><mml:mrow><mml:mi>k</mml:mi></mml:mrow><mml:mrow><mml:msup><mml:mrow><mml:mrow><mml:mo stretchy="false">(</mml:mo><mml:mrow><mml:mn>1</mml:mn><mml:mo>-</mml:mo><mml:mi>u</mml:mi></mml:mrow><mml:mo stretchy="false">)</mml:mo></mml:mrow></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow></mml:mfrac><mml:mo>.</mml:mo></mml:mtd></mml:mtr></mml:mtable></mml:math></disp-formula>
<p>The initial conditions are <italic>u</italic>(0) &#x0003D; 0, <italic>u</italic>&#x02032;(0) &#x0003D; 0.</p>
<p>As shown in <xref ref-type="fig" rid="F2">Figure 2</xref>, the numerical solution corresponding to different &#x003B1; in Equation (7) is given. We can see that when k exceeds the critical value, a pull-in phenomenon occurs [<xref ref-type="bibr" rid="B1">1</xref>]. <xref ref-type="fig" rid="F2">Figure 2</xref> shows the Pull-in curve calculated under the three cases of &#x003B1; &#x0003E; 1, &#x003B1; = 1, and &#x003B1; &#x0003C; 1. It can be seen that when&#x003B1; &#x0003E; 1, Pull-in will happen very soon. From the enlarged picture, it can also be seen that there is a short platform. When &#x003B1; &#x0003C; 1, the occurrence of pull-in will become slower and slower as a decreases. When &#x003B1; = 0.4, a very long platform appears. At this time, relatively speaking, the occurrence of pull-in at &#x003B1; = 1.5 is almost instantaneously. It can be seen that the fractal model of MEMS we have established can control the occurrence time of pull-in and the stable time by adjusting the value of the fractional index.</p>
<fig id="F2" position="float">
<label>Figure 2</label>
<caption><p>Pull-in instability for different values of &#x003B1; and k = 0.1252.</p></caption>
<graphic xlink:href="fphy-09-606011-g0002.tif"/>
</fig>
<p><xref ref-type="fig" rid="F3">Figure 3</xref> shows the pull-in curve when &#x003B1; = 0.2. It can be seen that the platform at this time has become quite long, which also means that the pull-in is infinitely delayed, which means that we have obtained a stable pull-in. And when it is smaller, the pull-in will be more stable.</p>
<fig id="F3" position="float">
<label>Figure 3</label>
<caption><p>Pull-in stability for &#x003B1; &#x0003D; 0.2.</p></caption>
<graphic xlink:href="fphy-09-606011-g0003.tif"/>
</fig></sec>
<sec sec-type="conclusions" id="s4">
<title>Conclusion</title>
<p>In this paper, we studied MEMS which prepared <italic>via</italic> graphene in fractal space and established a corresponding fractal model. In the fractal space, by discussing different fractional index &#x003B1;, we found that we can control the occurrence and stable time of pull-in by adjusting the fractional index. The fractal model of MEMS we established can broaden the application range of it, which can be used in any discontinuous media. Pull in stability can guide MEMS to work more efficiently.</p></sec>
<sec sec-type="data-availability-statement" id="s5">
<title>Data Availability Statement</title>
<p>The raw data supporting the conclusions of this article will be made available by the authors, without undue reservation.</p></sec>
<sec id="s6">
<title>Author Contributions</title>
<p>DT and C-HH designed the experiments. DT performed data analysis and wrote the paper. J-HH revised the paper. All authors read and contributed to the manuscript.</p></sec>
<sec sec-type="COI-statement" id="conf1">
<title>Conflict of Interest</title>
<p>The authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest.</p></sec>
</body>
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