Original Research Published on 25 Apr 2019 3D Patterning of Si by Contact Etching With Nanoporous Metals in Chemical and Process Engineering Stéphane BastideEncarnacion TorralbaMathieu HalbwaxSylvain Le GallElias MpoguiChristine Cachet-VivierVincent MagninJoseph HarariDmitri YarekhaJean-Pierre Vilcot Frontiers in Chemistry doi 10.3389/fchem.2019.00256 9,624 views 16 citations