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2 articles related to "Electron Beam Lithography"

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Articles

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Review Article

Published on 26 Jun 2019

3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology

Noriyuki Unno
Jun Taniguchi

Advanced Optical Technologies

doi 10.1515/aot-2019-0004

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Letter

Published on 26 Jun 2019

Single-digit 6-nm multilevel patterns by electron beam grayscale lithography

Robert Kirchner
Vitaliy A. Guzenko
Helmut Schift

Advanced Optical Technologies

doi 10.1515/aot-2019-0016