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Review Article
Published on 08 Jan 2015
Resist material options for extreme ultraviolet lithography
Advanced Optical Technologies
doi 10.1515/aot-2015-0028
37 articles related to "Extreme Ultraviolet"
Articles
Original Research
Published on 10 Dec 2018
Carrier-Envelope-Phase Controlled Attosecond Pulse Generation by Undulator Radiation
in Optics and Photonics
Frontiers in Physics
doi 10.3389/fphy.2018.00140
- 3,532 views
- 4 citations
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Review Article
Published on 01 Sep 2012
Advances in EUV light sources
Advanced Optical Technologies
doi 10.1515/aot-2012-0125
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Review Article
Published on 27 Jun 2017
Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Advanced Optical Technologies
doi 10.1515/aot-2017-0019
Original Research
Published on 18 May 2015
Extending resonant inelastic X-ray scattering to the extreme ultraviolet
in Condensed Matter Physics
Frontiers in Physics
doi 10.3389/fphy.2015.00032
- 7,443 views
- 16 citations
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Tutorial
Published on 27 Jun 2017
Photoresists in extreme ultraviolet lithography (EUVL)
Advanced Optical Technologies
doi 10.1515/aot-2017-0021
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Research article
Published on 27 Jun 2017
Challenges of anamorphic high-NA lithography and mask making
Advanced Optical Technologies
doi 10.1515/aot-2017-0024
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Research article
Published on 08 Jan 2015
Flat-field anastigmatic mirror objective for high-magnification extreme ultraviolet microscopy
Advanced Optical Technologies
doi 10.1515/aot-2015-0020
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Research article
Published on 01 Feb 2014
Light scattering of interference coatings from the IR to the EUV spectral regions
Advanced Optical Technologies
doi 10.1515/aot-2013-0048
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Review Article
Published on 20 Dec 2017
Coherent diffractive imaging methods for semiconductor manufacturing
Advanced Optical Technologies
doi 10.1515/aot-2017-0052
Mini Review
Published on 15 Jan 2026
High-harmonic generation in two-dimensional semiconductors
in Nanophotonics
Frontiers in Nanotechnology
doi 10.3389/fnano.2025.1667217
- 683 views
Perspective
Published on 22 Jul 2022
Ionospheric photoelectrons: A lateral thinking approach
in Space Physics
Frontiers in Astronomy and Space Sciences
doi 10.3389/fspas.2022.952226
- 3,235 views
- 4 citations
Original Research
Published on 12 May 2022
Fragmentation Dynamics of Fluorene Explored Using Ultrafast XUV-Vis Pump-Probe Spectroscopy
in Chemical Physics and Physical Chemistry
Frontiers in Physics
doi 10.3389/fphy.2022.880793
- 5,000 views
- 12 citations
Brief Research Report
Published on 13 Mar 2025
Multi-scale energy release events in the quiet Sun: a possible source for coronal heating
in Stellar and Solar Physics
Frontiers in Astronomy and Space Sciences
doi 10.3389/fspas.2025.1536035
- 1,800 views
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Review Article
Published on 08 Jan 2015
Development of element technologies for EUVL
Advanced Optical Technologies
doi 10.1515/aot-2015-0027
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Review Article
Published on 01 Sep 2012
Development of core technologies on EUV mask and resist for sub-20-nm half pitch generation
Advanced Optical Technologies
doi 10.1515/aot-2012-0029