Review Published on 15 Oct 2014 Impact of Atomic Layer Deposition to Nanophotonic Structures and Devices in Thin Solid Films Muhammad Rizwan SaleemRizwan AliMohammad Bilal KhanSeppo HonkanenJari Turunen Frontiers in Materials doi 10.3389/fmats.2014.00018 15,017 views 22 citations