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1 article related to "Rpecvd"

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Articles

Original Research

Published on 18 Mar 2020

Process for Growth of Group-IV Alloys Containing Tin by Remote Plasma Enhanced Chemical Vapor Deposition

in Semiconducting Materials and Devices

B. Claflin
G. J. Grzybowski
M. E. Ware
S. Zollner
A. M. Kiefer

Frontiers in Materials

doi 10.3389/fmats.2020.00044

4,532 views
28 citations