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1 article related to "Saw Sensor"

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Articles

Original Research

Published on 24 Jun 2021

In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

in Smart Materials

Rui Ma
Weiguo Liu
Xueping Sun
Shun Zhou

Frontiers in Materials

doi 10.3389/fmats.2021.678658

3,958 views
2 citations