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3 articles related to "Electrostatic Actuation"

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Articles

Original Research

Published on 19 Feb 2021

Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers

in Micro- and Nanoelectromechanical Systems

Andreas Kainz
Roman Beigelbeck
Silvan Schmid

Frontiers in Mechanical Engineering

doi 10.3389/fmech.2020.611590

5,480 views
1 citation

Original Research

Published on 01 Mar 2016

A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

in Micro- and Nanoelectromechanical Systems

Adhitya Bhaswara
Hohyun Keum
Fabrice Mathieu
Bernard Legrand
Seok Kim
Liviu Nicu
Thierry Leïchlé

Frontiers in Mechanical Engineering

doi 10.3389/fmech.2016.00001

4,718 views
2 citations

Original Research

Published on 25 Apr 2025

Modeling and numerical analysis for MEMS graphene resonator

in Interdisciplinary Physics

Ji-Huan He
Qingmei Bai
Ye-Cheng Luo
Dilyara Kuangaliyeva
Grant Ellis
Yerkebulan Yessetov
Piotr Skrzypacz

Frontiers in Physics

doi 10.3389/fphy.2025.1551969

2,608 views
19 citations