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1 article related to "Epitaxial Quality"

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Articles

Original Research

Published on 28 Oct 2020

An Experimental and Theoretical Study of the Impact of the Precursor Pulse Time on the Growth Per Cycle and Crystallinity Quality of TiO2 Thin Films Grown by ALD and PEALD Technique

in Micro- and Nanoelectromechanical Systems

William Chiappim
Mariana Amorim Fraga
Homero Santiago Maciel
Rodrigo Sávio Pessoa

Frontiers in Mechanical Engineering

doi 10.3389/fmech.2020.551085

11,688 views
22 citations