Original Research
Published on 18 May 2015
Extending resonant inelastic X-ray scattering to the extreme ultraviolet
in Condensed Matter Physics
Frontiers in Physics
doi 10.3389/fphy.2015.00032
- 7,428 views
- 16 citations
47 articles related to "Euv"
Articles
PDF-read only
Review Article
Published on 27 Jun 2017
EUV mask defectivity – a process of increasing control toward HVM
Advanced Optical Technologies
doi 10.1515/aot-2017-0017
PDF-read only
Review Article
Published on 08 Jan 2015
Resist material options for extreme ultraviolet lithography
Advanced Optical Technologies
doi 10.1515/aot-2015-0028
PDF-read only
Review Article
Published on 27 Jun 2017
Development and performance of EUV pellicles
Advanced Optical Technologies
doi 10.1515/aot-2017-0023
PDF-read only
Review Article
Published on 27 Jun 2017
Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Advanced Optical Technologies
doi 10.1515/aot-2017-0019
PDF-read only
Research article
Published on 01 Sep 2012
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Advanced Optical Technologies
doi 10.1515/aot-2012-0127
PDF-read only
Review Article
Published on 01 Sep 2012
Development of core technologies on EUV mask and resist for sub-20-nm half pitch generation
Advanced Optical Technologies
doi 10.1515/aot-2012-0029
PDF-read only
Review Article
Published on 27 Jun 2017
Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling
Advanced Optical Technologies
doi 10.1515/aot-2017-0029
PDF-read only
Review Article
Published on 01 Sep 2012
Advances in EUV light sources
Advanced Optical Technologies
doi 10.1515/aot-2012-0125
PDF-read only
Research article
Published on 20 Dec 2017
Ptychographic imaging with partially coherent plasma EUV sources
Advanced Optical Technologies
doi 10.1515/aot-2017-0050
PDF-read only
Review Article
Published on 08 Jan 2015
Development of element technologies for EUVL
Advanced Optical Technologies
doi 10.1515/aot-2015-0027
Original Research
Published on 04 Jan 2022
Blobs in a Solar EUV Jet
in Stellar and Solar Physics
Frontiers in Astronomy and Space Sciences
doi 10.3389/fspas.2021.786856
- 3,935 views
- 20 citations
PDF-read only
Review Article
Published on 08 Jan 2015
Performance of 100-W HVM LPP-EUV source
Advanced Optical Technologies
doi 10.1515/aot-2015-0025
PDF-read only
Views
Published on 08 Jan 2015
ITRS lithography roadmap: 2015 challenges
Advanced Optical Technologies
doi 10.1515/aot-2015-0036
Review
Published on 24 Nov 2022
Coronal spectral diagnostics: The coronal solar magnetism observatory (COSMO)
in Space Physics
Frontiers in Astronomy and Space Sciences
doi 10.3389/fspas.2022.1059716
- 2,380 views
- 2 citations
Original Research
Published on 31 Mar 2016
Evidence for a Magnetic Flux Rope in Observations of a Solar Prominence-Cavity System
in Stellar and Solar Physics
Frontiers in Astronomy and Space Sciences
doi 10.3389/fspas.2016.00010
- 5,781 views
- 16 citations