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1 article related to "Hppms"

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Articles

Original Research

Published on 18 Oct 2017

The Target Material Influence on the Current Pulse during High Power Pulsed Magnetron Sputtering

in Low-Temperature Plasma Physics

Filip Moens
Stéphanos Konstantinidis
Diederik Depla

Frontiers in Physics

doi 10.3389/fphy.2017.00051

4,559 views
12 citations