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Letter
Published on 26 Jun 2019
Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
Advanced Optical Technologies
doi 10.1515/aot-2019-0016
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Letter
Published on 26 Jun 2019
Original Research
Published on 04 Sep 2018
in Chemical and Process Engineering
Original Research
Published on 27 Jul 2023
in Polymeric and Composite Materials