Original Research Published on 18 Jan 2021 Advances in 3D Sensor Technology by Using Stepper Lithography in Radiation Detectors and Imaging Maurizio BoscardinSara FerrariFrancesco FicorellaAdriano LaiRoberto MendicinoMarco MeschiniSabina RonchinMd. Arif Abdulla SamyGian-Franco Dalla Betta Frontiers in Physics doi 10.3389/fphy.2020.625275 4,616 views 22 citations