Review
Published on 15 Oct 2014
Impact of Atomic Layer Deposition to Nanophotonic Structures and Devices
in Thin Solid Films
Frontiers in Materials
doi 10.3389/fmats.2014.00018
- 15,152 views
- 22 citations
39 articles related to "Atomic Layer"
Articles
Original Research
Published on 28 Oct 2020
An Experimental and Theoretical Study of the Impact of the Precursor Pulse Time on the Growth Per Cycle and Crystallinity Quality of TiO2 Thin Films Grown by ALD and PEALD Technique
in Micro- and Nanoelectromechanical Systems
Frontiers in Mechanical Engineering
doi 10.3389/fmech.2020.551085
- 11,945 views
- 22 citations
Original Research
Published on 26 Apr 2024
Atomic layer deposited TiO2 nanofilm on titanium implant for reduced the release of particles
in Biomaterials
Frontiers in Bioengineering and Biotechnology
doi 10.3389/fbioe.2024.1346404
- 3,806 views
- 5 citations
Mini Review
Published on 12 Mar 2018
Toward 3D Solid-State Batteries via Atomic Layer Deposition Approach
in Electrochemical Energy Storage
Frontiers in Energy Research
doi 10.3389/fenrg.2018.00010
- 11,591 views
- 31 citations
Original Research
Published on 13 Jun 2024
Gallium-incorporated TiO2 thin films by atomic layer deposition for future electronic devices
in Semiconducting Materials and Devices
Frontiers in Materials
doi 10.3389/fmats.2024.1430884
- 2,974 views
- 1 citation
Original Research
Published on 24 May 2018
Synthesis of Functional Ceramic Supports by Ice Templating and Atomic Layer Deposition
in Ceramics and Glass
Frontiers in Materials
doi 10.3389/fmats.2018.00028
- 4,157 views
- 1 citation
Original Research
Published on 24 Jul 2025
Failure behavior of polymer microelectrode arrays encapsulated with conventional ALD and 3D-ALI barriers
in Biomechanics
Frontiers in Bioengineering and Biotechnology
doi 10.3389/fbioe.2025.1622927
- 3,301 views
- 2 citations
Original Research
Published on 21 Oct 2020
Construct of Carbon Nanotube-Supported Fe2O3 Hybrid Nanozyme by Atomic Layer Deposition for Highly Efficient Dopamine Sensing
in Nanoscience
Frontiers in Chemistry
doi 10.3389/fchem.2020.564968
- 4,818 views
- 16 citations
Original Research
Published on 04 Nov 2022
Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water
in Theoretical and Computational Chemistry
Frontiers in Chemistry
doi 10.3389/fchem.2022.1035902
- 7,154 views
- 7 citations
Original Research
Published on 14 Jan 2026
Atomic layer deposited HfZrO4-based memristive devices: annealing effect and multilevel storage capability
in Nanodevices
Frontiers in Nanotechnology
doi 10.3389/fnano.2026.1729291
- 1,040 views
Original Research
Published on 09 Sep 2025
TiO2 nanotubes guided Pt nanorods growth via atomic layer deposition for mild photothermal antibacterial activity and enhanced fibroblast response
in Biomaterials
Frontiers in Bioengineering and Biotechnology
doi 10.3389/fbioe.2025.1672011
- 1,663 views
Original Research
Published on 09 Oct 2019
Boosting HER Performance of Pt-Based Catalysts Immobilized on Functionalized Vulcan Carbon by Atomic Layer Deposition
in Energy Materials
Frontiers in Materials
doi 10.3389/fmats.2019.00251
- 14,483 views
- 74 citations
Original Research
Published on 25 Mar 2015
Development of electrostatic supercapacitors by atomic layer deposition on nanoporous anodic aluminum oxides for energy harvesting applications
in Condensed Matter Physics
Frontiers in Physics
doi 10.3389/fphy.2015.00012
- 8,231 views
- 16 citations
Correction
Published on 20 Dec 2022
Corrigendum: Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water
in Theoretical and Computational Chemistry
Frontiers in Chemistry
doi 10.3389/fchem.2022.1118819
- 1,325 views
Original Research
Published on 11 Dec 2020
Atomic Layer Deposition of SnO2-Based Composite Anodes for Thin-Film Lithium-Ion Batteries
in Electrochemical Energy Storage
Frontiers in Energy Research
doi 10.3389/fenrg.2020.609417
- 5,074 views
- 18 citations
Original Research
Published on 12 Dec 2025
Enhanced electrical stability of IGZO thin-film transistors using atomic layer deposited Al2O3/HfO2 dual-layer gate insulator
in Semiconducting Materials and Devices
Frontiers in Materials
doi 10.3389/fmats.2025.1735405
- 2,426 views
- 1 citation