Original Research Published on 29 Jan 2025 Epitaxial growth of transition metal nitrides by reactive sputtering in Semiconducting Materials and Devices Florian HörichChristopher LüttichJona GrümbelJürgen BläsingMartin FenebergArmin DadgarRüdiger GoldhahnAndré Strittmatter Frontiers in Materials doi 10.3389/fmats.2025.1507123 2,507 views