- 1Laboratori Nazionali del Sud (LNS), Istituto Nazionale di Fisica Nucleare (INFN), Catania, Italy
- 2Dipartimento di Ingegneria Industriale, Università degli Studi di Roma Tor Vergata, Roma, Italy
- 3Sezione di Roma 2 - Istituto Nazionale di Fisica Nucleare (INFN), Roma, Italy
Accurate dosimetry is crucial in radiotherapy and particle therapy to ensure that prescribed doses are delivered to tumors while minimizing damage to healthy tissue. Advanced dosimetry systems are needed to meet the challenges of modern techniques (small fields, high dose gradients, ultra-high dose rates). Silicon carbide (SiC), a wide bandgap semiconductor, has emerged as a promising material for next-generation radiation detectors. This review highlights the role of SiC in dosimetry for photon, electron, proton, and carbon ion beams, including the new FLASH ultra-high dose rate radiotherapy. We summarize SiC’s advantageous physical properties and survey its use in various detector architectures. In conclusion, SiC shows excellent linearity, radiation tolerance, and the potential to complement or outperform conventional dosimeters. Ongoing developments and multidisciplinary research are expected to address remaining challenges and pave the way for SiC’s integration into clinical dosimetry and future high-performance applications.
1 Introduction
Accurate and reliable dosimetry is essential in modern radiotherapy to ensure precise delivery of prescribed doses to tumors while minimizing damage to healthy tissues. As treatment techniques become increasingly sophisticated-such as intensity-modulated radiation therapy (IMRT), volumetric modulated arc therapy (VMAT), stereotactic radiosurgery (SRS), proton therapy, and ultra-high dose rate (UHDR) FLASH radiotherapy-the requirements on dosimetric systems have also evolved. Dosimeters must now respond accurately across a wide range of dose rates, energies, and beam modalities, often with time-resolved (sub-microsecond) readout and high spatial fidelity. In practical terms, modern dosimeters must achieve: (i) time-resolved readout with sub-microsecond response for pulsed beams; (ii) wide dynamic range and linearity from conventional rates up to ultra-high dose-rate (UHDR) conditions; (iii) small active volume and high spatial resolution for small-field dosimetry; (iv) minimal energy dependence (near-water response) across kV–MV photon beams and clinical electron/proton energies; (v) robustness against cumulative dose and environmental drifts; and (vi) traceable calibration suitable for reference and end-to-end QA workflows. These requirements are emphasized by current recommendations and by recent commissioning studies in preclinical kV and FLASH contexts (Wolf et al., 2025; Vignati et al., 2020; Andreo et al., 2024). In the specific case of FLASH radiotherapy, beams deliver
2 Physical and technological properties
2.1 Material properties relevant to dosimetry
Silicon carbide’s material properties make it highly attractive for radiation detection (Table 1). Leading among its distinguishing characteristics, is the wide bandgap energy
Table 1. Core physical properties of SiC vs. Si and diamond (focus materials for active clinical dosimetry). Scope: Table 1 intentionally focuses on Si/SiC/diamond as the most established active dosimetric semiconductors; other options cited in Intro are summarized qualitatively in Section 2.3.
In summary, SiC combines low leakage from its wide bandgap with high thermal conductivity, which together underpin stable operation at elevated temperatures and reduced thermal drift during prolonged irradiations, key advantages for dosimetry (Nava et al., 2008). These intrinsic properties underpin SiC’s strong performance as an active dosimeter material. The following subsections illustrate how these material advantages translate into enhanced device performance for dosimetric applications.
2.2 Device architectures and readout modes
A variety of SiC device architectures have been employed for dosimetry. The simplest and most common structure is the planar Schottky diode: a rectifying metal contact on a doped SiC epitaxial layer with a conductive backside contact. Under reverse bias, a depleted sensitive volume forms in the semiconductor; electron–hole pairs generated by radiation are swept by the electric field and collected at the contacts. In Schottky diodes, the depletion region extends beneath the metal–semiconductor barrier, whereas in p–n diodes it spans the space-charge region across the junction. Schottky SiC diodes are relatively easy to fabricate and have been widely used in studies (e.g., for photon, electron, and proton beam dosimetry) (Bruzzi et al., 2001; Bertuccio et al., 2014; Lopez Paz et al., 2024; Capan, 2022; Fleta et al., 2024; Matsumoto et al., 2023). Figure 1 shows a typical Schottky SiC detector geometry (adapted from Capan (2022)).
p-n diodes in SiC have been explored, though forming shallow junctions in SiC can be technologically challenging due to its low dopant diffusion coefficients (La Via et al., 2014; Matsunami and Kimoto, 1997). One advantage of p-n diodes is the purely semiconductor interface (avoiding metal-semiconductor barrier in Schottky), potentially reducing leakage further, though SiC Schottky diodes already have extremely low dark currents. An important initiative to advance p-n junction SiC detectors was the SICILIA project (Silicon Carbide Detectors for Intense Luminosity Investigations and Applications), a collaboration between the Italian National Institute for Nuclear Physics (INFN) and the Institute for Microelectronics and Microsystems of the National Research Council (IMM-CNR), fully funded by INFN (Tudisco et al., 2018; Altana C. et al., 2023). The project targets high-quality homoepitaxial growth on low-defect-density 4H-SiC substrates to enable detector-grade layers with controlled thickness and doping, which are directly relevant to Schottky, p–n, MSM, and MOSFET dosimetric architectures. These process improvements—demonstrated within the SICILIA program—translate into lower leakage, higher breakdown fields and reproducible active thicknesses that are beneficial not only for nuclear-physics devices but also for radiotherapy dosimetry (Altana C. et al., 2023; Tudisco et al., 2018; La Via et al., 2014). In practice, ‘defect-free’ SiC at wafer scale is not realistic; the goal for detector-grade material is to minimize electrically active defects. State-of-the-art 4H-SiC uses CVD with optimized chlorinated chemistry (e.g., trichlorosilane + HCl) and high growth rates to suppress homogeneous Si nucleation, reduce basal-plane dislocations and Shockley stacking faults, and improve lifetime uniformity across the wafer, which directly benefits leakage and breakdown margins. Leakage minimization relies on defect-minimized epitaxy, high-quality surface passivation and multi-guard-ring edges to suppress perimetral currents; clean metal stacks and controlled anneals limit interface states. Combined with the wide bandgap, these measures yield ultra-low dark currents at room temperature and stable breakdown margins over the radiotherapy temperature range, enabling low-noise current-mode or pulse-mode dosimetry. As illustrated in Figure 2, one device features a thin
Figure 2. Schematic cross-section of a SiC p-n diode with a 10
Metal–semiconductor–metal (MSM) photodiodes employ two back-to-back Schottky contacts patterned as interdigitated fingers on a semi-insulating or lightly doped SiC layer. Unlike Schottky or p–n diodes with a vertical depletion region, MSMs establish a predominantly lateral drift region between adjacent fingers; the sensitive volume and response time are governed by finger spacing, depletion width under each contact, and carrier transport in the intervening gap. MSM detectors are known for their fast temporal response and ease of fabrication (Zhang, 2015; Sellin and Vaitkus, 2006). However, their sensitive volume is generally smaller than in Schottky or p-n diodes, limited by the spacing of electrodes and the resistivity of the substrate. A typical structure is shown in Figure 3, where the MSM photodetector is fabricated on an n-type 4H-SiC epilayer over a heavily doped
Figure 3. (a) A cross-sectional view of 4H-SiC MSM photodetectors Zhang (2015) (b) Cross-section of a SiC MOSFET dosimeter Yadav et al. (2016).
While a broad MSM/MOSFET literature exists for UV photodetection and power electronics, reports focused specifically on radiotherapy dosimetry are comparatively few; we therefore show representative implementations. Regardless of device structure, the readout modes for SiC detectors can be categorized as:
1. Current mode: the detector is biased and the steady-state current (pA–nA range) induced by a radiation beam is measured, usually with a low-noise ammeter or integrator. This mode provides real-time dose rate information and is commonly used for continuous beams (e.g., clinical linac output at nominal dose rates). In practice, integrating the measured current over irradiation time yields the collected charge, which, after calibration, provides the absorbed dose, as routinely done also for conventional linacs.
2. Pulse mode resolves the charge associated with each radiation pulse (or single particle), using a charge-sensitive preamplifier and shaping electronics. For high-repetition beams, summing pulse-by-pulse charge converges to the same average as current mode, but pulse mode preserves per-pulse information (e.g., dose-per-pulse and instantaneous dose rate), which is critical for UHDR/FLASH characterizations.
The mode chosen depends on the application requirements: current mode is simpler and often sufficiently linear, while pulse mode may better handle extreme dose rates. Recent studies have demonstrated robust linearity and stable response of SiC diodes at ultra-high dose-per-pulse when read in pulse-resolved configurations, supporting their use in FLASH beams (Fleta et al., 2024; López Paz C. et al., 2025). To protect SiC diodes from electrostatic discharge and sudden voltage spikes, simple, well-established measures are adopted at the detector and readout level. The preamplifier input is protected with small, fast surge-protection diodes and a modest series resistor to limit fault current. The bias line includes a resistor–capacitor filter to smooth abrupt transients. The detector layout uses multiple guard rings and high-quality edge passivation to suppress surface currents. Cables and connectors are shielded, and the system is assembled and handled under standard electrostatic-control procedures. Together, these measures prevent damage without reducing the ability to record very short radiation pulses. In the remainder, Sections 3–5 concentrate on Schottky and p–n diodes, the architectures most mature for clinical dosimetry, while MSM and MOSFET devices are highlighted where dosimetric results are available (e.g., time response and stability in pulsed/UHDR beams).
2.3 Comparison across detector materials used in radiotherapy dosimetry
SiC diode dosimeters offer a distinctive combination of radiation tolerance, real-time readout, and long-term stability when compared with established detector materials, notably silicon and single-crystal diamond. To keep the comparison physically meaningful, we separate material properties (e.g.,
A quantitative baseline for charge sensitivity per unit volume is provided in Fleta et al. (2024), Table 1: Si
3 Photon and electron radiotherapy
Megavoltage photon beams, ranging from a few MV to 25 MV, and electron beams, spanning 4–25 MeV, are primarily produced by medical linear accelerators (linacs) for use in external beam radiotherapy. These well-established methods rely on precise dosimetry protocols to ensure both the safety and effectiveness of treatments. Reference dosimetry is generally performed using ionization chambers, following the IAEA TRS-398 code of practice (Andreo et al., 2024). For relative and in-vivo measurements, clinical guidelines require that relative dosimetry detectors (diodes) demonstrate short-term reproducibility better than
3.1 Performance of SiC detectors under clinical beams
SiC diodes have recently emerged as promising candidates for dosimetry in both photon and electron therapy owing to their wide bandgap, high radiation hardness, and low leakage current. Under a 6 MV photon beam, Bertuccio el al. focused on the evaluation of the SiC diode as a dosimeter (Bertuccio et al., 2014). The 4H-SiC semiconductor with an area of 5
The performance of SiC detectors has also been evaluated using a 60Co gamma source. Key parameters such as stability, reproducibility, signal-to-noise ratio, dose linearity, and dose-rate linearity were investigated. At a dose rate of
More recently, López Paz et al. introduced and demonstrated the viability of a novel SiC prototype diode enhanced with an epitaxially-grown graphene layer. This innovative device represents a significant advancement in the design of semiconductor-based dosimeters, as the substitution of the conventional metal contact with graphene minimizes secondary interactions such as X-ray scattering, which can otherwise affect dose measurements, an especially critical factor in clinical environments where high precision is essential. The prototype was characterized under clinical conditions using a 6 MV photon beam with dose rates ranging from 1 to 6 Gy/min. The main focus of the evaluation was on the linearity of the current response as a function of the dose rate. The results demonstrated outstanding linearity across the entire dose-rate interval, with deviations consistently remaining below
Comparable study has been conducted under electron beam over clinically relevant dose ranges
Although absolute sensitivity values (e.g.,
4 Proton and carbon ion therapy
Proton and carbon ion therapy are types of radiotherapy using charged particles in the range of 50–250 MeV for protons and 85–430 MeV per nucleon for carbon ion (Andreo et al., 2024). Unlike conventional photon therapy, charged particle beams offer a distinct depth-dose distribution with a sharp dose peak known as the Bragg peak. This feature allows precise tumor targeting and minimizing damage to surrounding tissue. However, the peculiarity of dose deposition imposes stringent dosimetric requirements in terms of spatial resolution, LET-dependence, etc. For clinical quality assurance, detectors are expected to provide sub-2% dose uncertainty, spatial resolution below 1 mm, and stable response over dose, dose rates ranging from 0.1 to 5 Gy/s. The typical range accuracy required for treatment planning verification is within 1 mm of the prescribed depth. In addition to these requirements, preferred detector characteristics include short- and long-term stability and reproducibility, high sensitivity, low leakage current, radiation hardness, linear response with respect to dose and dose rate, and negligible temperature dependence. In accordance with the IAEA technical report 398 (Andreo et al., 2024), the relative standard uncertainty of the absorbed dose at the reference depth, measured by a calibrated ionization chamber, should not exceed 1.7% for proton and 2.7% for carbon beams. However, there is growing interest in employing different solid-state detectors as alternative relative dosimeters. This is due to the higher ionization density in the semiconductor materials, which reduces the detector volume and, therefore, increases the spatial resolution. However, the higher ionization density, especially in high linear energy transfer (LET) beams such as the carbon beam, as well as at the distal edge of the Bragg peak, contributes to the saturation effect, requiring careful consideration in dosimetric applications. Unlike conventional radiotherapy, the use of semiconductor detectors for proton and carbon therapy has not yet been established clinically. For this reason, their application to relative dosimetry is currently under investigation and typically relies on cross-calibration against ionization chambers. One such semiconductor detector is SiC, which has been studied in the context of the detector response dependence on various factors and its possible use as relative dosimetry in proton and carbon ion therapy. The following subsections discuss the selected studies on the SiC performance irradiated by proton and carbon ions, and it does not represent a comprehensive review.
4.1 Performance of SiC detectors in proton therapy
Petringa et al. tested a SiC detector developed within the SICILIA project using clinical proton beams at 62 MeV, both monochromatic and modulated (Petringa et al., 2020). The detector exhibited excellent linearity across a dose range of 2–15 Gy, with deviations from the linear fit below
Further studies were carried out by Bruzzi et al., who investigated the performance of a 4H-SiC detector as a real-time dosimeter for proton beams in the energy range of 83–220 MeV and extraction currents from 1 to 10 nA (Bruzzi and Verroi, 2023). The detector demonstrated excellent linearity in response to dose rates ranging from 5 mGy/s to 2.7 Gy/s. At zero bias, a sensitivity of 2.65 nC/Gy was observed, consistent with theoretical predictions. The device response was nearly linear with proton fluxes from
Recent developments include PRAGUE (Proton Range Measure using Silicon Carbide), a multilayer system composed of stacked thin SiC detectors (10
4.2 Performance of SiC detectors in carbon therapy
A monoenergetic 290 MeV/u carbon beam at a maximum flux of therapeutic intensity (1E9 particles per second) was used to evaluate the response of SiC detectors in terms of radiation-induced current (RIC) under both biased and unbiased conditions at various depths in water (Kubodera et al., 2023). The RIC distribution reconstructed using the biased SiC detector was compared to the reference dose curve obtained from an ionization chamber along the Bragg peak. The peak-to-plateau ratios were found to be 3.68 for the SiC detector and 4.94 for the ionization chamber. Notable differences were observed in the plateau and tail regions, which were attributed to the SiC detector’s sensitivity to fragment ions. In contrast, measurements using the unbiased SiC detector were conducted at fewer depth points but still compared to the ionization chamber results. Interestingly, the peak-to-plateau ratio recorded with the unbiased SiC detector was higher than that obtained under biased conditions, which could be explained by the underestimation of the RIC at the plateau. The authors of the work suggested that these discrepancies were likely due to limitations in the detector structure and configuration, indicating a need for further optimization.
Carbon ion beam features superior biological effectiveness due to the higher LET, while the study of the LET effect requires a detector with a high spatial resolution. As noted earlier, due to the ionization density and therefore the thickness of an active volume, SiC detectors are suitable for LET measurement. Utilizing this characteristic of the SiC detector, several studies have been performed. One such study was performed by Matsumoto et al., which investigated an energy-dispersive SiC dosimeter for measuring the LET distribution under irradiation with both pristine and spread-out Bragg peak (SOBP) carbon beams (Matsumoto et al., 2023). LET measurements were conducted using a 290 MeV/u carbon beam at multiple positions, including the plateau, SOBP, and post-Bragg peak regions. The measured and dose-averaged LET values were subsequently applied to estimate the relative biological effectiveness (RBE) using a linear-quadratic model, assuming a cell survival rate of
4.3 SiC detectors for microdosimetry applications
In addition to macroscopic dose and LET measurements, SiC detectors are being investigated for microdosimetry, which quantifies stochastic energy deposition within micrometer-sized sensitive volumes relevant to biological effects.
Despite their advantages for microdosimetric studies—including high radiation hardness, fast response, low leakage currents, small active volumes, and high spatial resolution—SiC detectors have, to the best of our knowledge, not yet been reported in full peer-reviewed publications for clinical or experimental use, except for a conference abstract (Petringa et al., 2025b), where measured spectra showed depth-dependent trends consistent with expected LET variations, and derived microdosimetric parameters agreed with reference detectors and simulations.
5 FLASH radiotherapy
Ultra-high dose rate radiotherapy (UHDR-RT), commonly referred to as FLASH radiotherapy, represents a novel and rapidly developing approach in radiation therapy. It is characterized by mean dose rates typically exceeding
Table 3. Comparison of typical irradiation parameters between CONV and FLASH radiotherapy (Vozenin et al., 2022). DPP is the dose per pulse;
This technique has gained growing attention following the observation of the so-called FLASH effect, a remarkable biological phenomenon in which normal tissues exhibit a significant reduction in radiation-induced toxicity, while tumor control efficacy remains comparable to that achieved with conventional dose rates (Favaudon et al., 2014; Gao et al., 2022; Adrian et al., 2023). This differential response effectively widens the therapeutic window, with reported reductions in the normal tissue complication probability (NTCP) ranging from 10% to 50%, while maintaining a dose-rate-independent tumor control probability (TCP) (Vozenin et al., 2022). Although the underlying mechanisms of the FLASH effect are still under active investigation, several hypotheses have been proposed (El Khatib et al., 2022; Guo et al., 2024). The magnitude of the FLASH sparing effect is expected to be tissue-dependent. Baseline oxygenation, vascularization and repair dynamics differ across organs and tumour histologies; consequently, the optimal combination of dose-per-pulse, pulse repetition frequency and total irradiation time may vary by tissue. Current evidence and mechanistic hypotheses (e.g., oxygen depletion kinetics) support including tissue-specific endpoints in protocol optimization and reporting FLASH-relevant beam parameters alongside biological outcomes. Ongoing preclinical studies continue to explore these mechanisms across various biological models and radiation modalities (Durante et al., 2017; Lin et al., 2021; Borghini et al., 2024). A complete, organ-specific optimization framework lies beyond the scope of this review; in practice, centres combine tissue-specific normal-tissue endpoints with systematic reporting of time-structure metrics (dose-per-pulse, pulse width, PRF, total delivery time) and validate safe operating windows using fast detectors (e.g., SiC) cross-checked against reference dosimetry. The first evidence of clinical feasibility was reported in 2019, when a 75-year-old patient with skin lymphoma received a single 15 Gy fraction in 90 ms using a 5.4 MeV electron beam, marking the first human FLASH treatment (Bourhis et al., 2019). More recently, the first proton FLASH clinical trial demonstrated the potential to extend the technique beyond electron-based systems, confirming the clinical viability of FLASH-RT using particle beams (Mascia et al., 2023). To safely and reproducibly deliver UHDR-RT, the development of advanced dosimetric systems is of paramount importance. Accurate, real-time, and high-resolution measurements are required to monitor beam output and spatial uniformity under such extreme irradiation conditions. However, conventional dosimeters, optimized for standard dose-rate applications, often exhibit saturation effects, non-linear response, or significant recombination losses when exposed to UHDR pulses. Therefore, the design and characterization of radiation-hard, fast-response detectors are crucial steps toward establishing reliable dosimetric protocols and robust quality assurance frameworks for the clinical implementation of FLASH radiotherapy (Montay-Gruel et al., 2023). In this context, SiC detectors have emerged as promising candidates due to their fast response time, high radiation tolerance, and potential for real-time operation. Recent investigations have demonstrated the capability of SiC devices to maintain stable operation and a linear dose response under both UHDR electron and proton beams. Radiation hardness studies confirmed that SiC devices exhibit leakage currents up to four orders of magnitude lower than their silicon counterparts, maintaining rectifying behaviour even after irradiation fluences exceeding
6 Current challenges and future perspectives
Despite the significant progress achieved in the development of SiC detectors for radiotherapy dosimetry, several challenges remain that must be addressed to transition this technology from research laboratories to routine clinical implementation. One of the current practical limitations of SiC dosimetry lies in its lower signal per unit dose compared to silicon, due to the higher e–h pair creation energy (
Author contributions
GP: Conceptualization, Writing – review and editing, Writing – original draft. MG: Writing – review and editing. AK: Writing – review and editing, Writing – original draft, Conceptualization. ST: Writing – review and editing. CV: Writing – review and editing. GC: Investigation, Writing – review and editing, Writing – original draft.
Funding
The authors declare that financial support was received for the research and/or publication of this article. This research was supported by the Italian National Institute for Nuclear Physics (INFN) in the framework of three projects: DOTSiC (Telescopic Dosimeter in Silicon Carbide), PRAGUE (Proton Range Measure Using Silicon Carbide) and SiCILIA (Silicon Carbide Detectors for Intense Luminosity Investigations and Applications).
Conflict of interest
The authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest.
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Keywords: dosimetry, silicon carbide, radiotherapy, solid-state detector, particle therapy, ultra-high dose rate (UHDR), clinical application
Citation: Petringa G, Guarrera M, Kurmanova A, Tudisco S, Verona C and Cirrone GAP (2025) Silicon carbide sensors in radiotherapy dosimetry: progress, challenges, and perspectives. Front. Sens. 6:1622153. doi: 10.3389/fsens.2025.1622153
Received: 02 May 2025; Accepted: 12 November 2025;
Published: 01 December 2025.
Edited by:
Vincenzo Guidi, University of Ferrara, ItalyReviewed by:
Massimo Minuti, Ministry of Education, Universities and Research, ItalyRajeshkannan S, St Josephs College of Engineering, India
Copyright © 2025 Petringa, Guarrera, Kurmanova, Tudisco, Verona and Cirrone. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) and the copyright owner(s) are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.
*Correspondence: A. Kurmanova, a3VybWFub3ZhQGxucy5pbmZuLml0
M. Guarrera1