ORIGINAL RESEARCH article
Front. Phys.
Sec. Interdisciplinary Physics
Volume 13 - 2025 | doi: 10.3389/fphy.2025.1597421
This article is part of the Research TopicNonlinear Vibration and Instability in Nano/Micro Devices: Principles and Control StrategiesView all 17 articles
Harmonic Balance Method for MEMS Oscillators
Provisionally accepted
Xian-He Lei1
瑜桐 崔2*- 1Zhumadian Preschool Education College, Zhumadian, 驻马店, China
- 2Xi'an University of Architecture and Technology, Xi'an, Shaanxi Province, China
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Micro-electromechanical system (MEMS) oscillators are of critical importance in a variety of applications, including biosensors and wearable sensors. In order to optimize the performance of these devices and ensure reliability, it is essential to investigate their periodic properties and pull-in instability when studying MEMS oscillators with singularity. This research focuses on the harmonic balance method, a commonly employed approach in the analysis of nonlinear systems. Through indepth theoretical analysis, it has been found that the treatment of the singular term and the selection of the approximate solution in the harmonic balance method significantly affect the accuracy of determining the pull-in condition. Specifically, improper choices may result in substantial errors, while a well-selected approximate solution can enhance the accuracy of predicting pull-in instability.The research findings offer valuable insights for improving the application of the harmonic balance method in MEMS oscillator analysis and provide references for future studies.
Keywords: Micro-Electro-Mechanical System (MEMS), Harmonic balance method, Periodic solution, Pull-in instability, analytical solution
Received: 21 Mar 2025; Accepted: 06 Jun 2025.
Copyright: © 2025 Lei and 崔. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) or licensor are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.
* Correspondence: 瑜桐 崔, Xi'an University of Architecture and Technology, Xi'an, 710055, Shaanxi Province, China
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